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Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering 期刊论文
Applied Surface Science, 2011, 卷号: 257, 期号: 无期, 页码: 2269-2274
作者:  Kong QH(孔庆花);  Ji L(吉利);  Li HX(李红轩);  Liu XH(刘晓红);  Wang YJ(王永军);  Chen JM(陈建敏);  Zhou HD(周惠娣)
Adobe PDF(921Kb)  |  收藏  |  浏览/下载：222/2  |  提交时间：2012/09/24
Crnx FIlms  Medium Frequency Magnetron Sputtering  N2 Content  Microstructure  Mechanical Properties  Tribological Properties  
Microstructure, mechanical and tribological properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering 期刊论文
Surface and Coatings Technology, 2011, 卷号: 205, 页码: 3058-3065
作者:  Wang YJ(王永军);  Li HX(李红轩);  Ji L(吉利);  Zhao F(赵飞);  Kong QH(孔庆花);  Wang YX(王永霞);  Liu XH(刘晓红);  Quan WL(权伟龙);  Zhou HD(周惠娣);  Chen JM(陈建敏)
Adobe PDF(1807Kb)  |  收藏  |  浏览/下载：391/1  |  提交时间：2012/09/24
Unbalanced Magnetron Sputtering  Bias Voltage  Graphite-like Carbon FIlm  Microstructure  Tribological Properties  
Influence of substrate bias voltage on the microstructure and residual stress of CrN films deposited by medium frequency magnetron sputtering 期刊论文
Materials Science and Engineering B, 2011, 卷号: 176, 页码: 850-854
作者:  Gong QH(巩清华);  Ji L(吉利);  Li HX(李红轩);  Liu XH(刘晓红);  Wang YJ(王永军);  Chen JM(陈建敏);  Zhou HD(周惠娣)
Adobe PDF(519Kb)  |  收藏  |  浏览/下载：295/3  |  提交时间：2012/09/24
Crn FIlms  Medium Frequency Magnetron Sputterin  Substrate Bias Voltage  Microstructure  Residual Stress