| Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering | |
| Department | 固体润滑国家重点实验室 |
Kong QH(孔庆花); Ji L(吉利) ; Li HX(李红轩); Liu XH(刘晓红); Wang YJ(王永军); Chen JM(陈建敏); Zhou HD(周惠娣)
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| 2011 | |
| Source Publication | Applied Surface Science
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| ISSN | 0169-4332 |
| Volume | 257Issue:无期Pages:2269-2274 |
| Abstract | CrNx films were deposited on stainless steel and Si (1 1 1) substrates via medium frequency magnetron sputtering in aN2 +Armixed atmosphere. The influence ofN2 content on the deposition rate, composition, microstructure, mechanical and tribological properties of the as-deposited films was investigated by means of the X-ray photoelectron spectrometry (XPS), X-ray diffraction (XRD), field emission scanning electron microscope (FESEM), nanoindentation and tribometer testing. It was found that the N atomic concentration increased and the phase transformed fromamixture of Cr2N+ Cr(N) to single-phase Cr2N, and then Cr2N+ CrN to pure CrN phase with the increase of N2 content. The Cr 2p3/2 and N 1s of XPS spectra also confirmed the evolution of phase.Accordingly, allfilms exhibited a typical columnar structure which lies in the zone T of Thornton Model. The mixed Cr2N and Cr(N) phases showed low hardness and high friction coefficient. Cr2N possessed higher hardness than CrN while CrN exhibited lower friction coefficient. |
| Keyword | Crnx FIlms Medium Frequency Magnetron Sputtering N2 Content Microstructure Mechanical Properties Tribological Properties |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the National Natural Science Foundation of China (Grant NO.50705093);the Innovative Group Foundation from NSFC (Grant NO.50421502) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 磨损和表面工程组 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/670 |
| Collection | 固体润滑国家重点实验室（LSL） 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 |
| Corresponding Author | Li HX(李红轩) |
| Recommended Citation GB/T 7714 | Kong QH,Ji L,Li HX,et al. Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering[J]. Applied Surface Science,2011,257(无期):2269-2274. |
| APA | 孔庆花.,吉利.,李红轩.,刘晓红.,王永军.,...&周惠娣.(2011).Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering.Applied Surface Science,257(无期),2269-2274. |
| MLA | 孔庆花,et al."Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering".Applied Surface Science 257.无期(2011):2269-2274. |
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| 20112269-2274.PDF（921KB） | 开放获取 | License | View Application Full Text | |||
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