| Microstructure, mechanical and tribological properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering | |
| Department | 固体润滑国家重点实验室 ; 先进润滑与防护材料研究发展中心 |
Wang YJ(王永军); Li HX(李红轩) ; Ji L(吉利); Zhao F(赵飞); Kong QH(孔庆花); Wang YX(王永霞); Liu XH(刘晓红); Quan WL(权伟龙); Zhou HD(周惠娣); Chen JM(陈建敏)
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| 2011 | |
| Source Publication | Surface and Coatings Technology
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| ISSN | 0257-8972 |
| Volume | 205Pages:3058-3065 |
| Abstract | Graphite-like amorphous carbon (GLC) films were fabricated by unbalanced magnetron sputtering on silicon and stainless steel substrates. The effects of deposition bias voltage on the microstructure, mechanical and tribological properties of the resultant films were investigated by means of X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, atomic force microscopy (AFM), high resolution transmission electron microscopy (HRTEM), nano-indentation and tribological experiments, respectively. The results show that the present films are dominated by sp2 sites, and the microstructure and properties of the resultant films strongly depend upon the deposition bias voltage. Namely, the sp3 content, hardness, elastic modulus and critical load monotonically increase with increasing deposition bias voltage from 50 to 150 V, and then they decrease with further increasing the bias voltage to 185 V, while internal stress decreases at first and then increases with further increasing of deposition bias voltage. The films deposited at different bias voltages have high surface roughness. Tribological properties of the films are closely related with the deposition bias voltage, 150 V is the optimum value for obtaining good wear resistance. |
| Keyword | Unbalanced Magnetron Sputtering Bias Voltage Graphite-like Carbon FIlm Microstructure Tribological Properties |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the Natural Science Foundation of China (Grant NO.50705093;NO.50575217);the Innovative Group Foundation from NSFC (Grant NO.50421502);the National 973 Project (NO.2007 CB607601) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 磨损和表面工程组 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/816 |
| Collection | 固体润滑国家重点实验室（LSL） 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 |
| Corresponding Author | Chen JM(陈建敏) |
| Recommended Citation GB/T 7714 | Wang YJ,Li HX,Ji L,et al. Microstructure, mechanical and tribological properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering[J]. Surface and Coatings Technology,2011,205:3058-3065. |
| APA | 王永军.,李红轩.,吉利.,赵飞.,孔庆花.,...&陈建敏.(2011).Microstructure, mechanical and tribological properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering.Surface and Coatings Technology,205,3058-3065. |
| MLA | 王永军,et al."Microstructure, mechanical and tribological properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering".Surface and Coatings Technology 205(2011):3058-3065. |
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