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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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固体润滑国家重点实验... [4]
中国科学院材料磨损与... [4]
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刘晓红 [4]
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Creator:lihongxuan分李红轩
Creator:zhouhuidi分周惠娣
Creator:刘晓红
First author
Creator:王永军
Date Issued:2011
Document Type:期刊论文
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Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering
期刊论文
Applied Surface Science, 2011, 卷号: 257, 期号: 无期, 页码: 2269-2274
Authors:
Kong QH(孔庆花)
;
Ji L(吉利)
;
Li HX(李红轩)
;
Liu XH(刘晓红)
;
Wang YJ(王永军)
;
Chen JM(陈建敏)
;
Zhou HD(周惠娣)
Adobe PDF(921Kb)
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Submit date:2012/09/24
Crnx FIlms
Medium Frequency Magnetron Sputtering
N2 Content
Microstructure
Mechanical Properties
Tribological Properties
非平衡磁控溅射沉积类石墨碳膜结构及其摩擦学性能
期刊论文
中国表面工程, 2011, 卷号: 24, 期号: 3, 页码: 17-22
Authors:
王永军
;
李红轩
;
吉利
;
刘晓红
;
吴艳霞
;
周惠娣
;
陈建敏
Adobe PDF(1483Kb)
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Submit date:2012/09/24
类石墨碳膜
磁控溅射
摩擦磨损
Graphite-like Carbon Film
Microstructure
Tribological Properties
Microstructure, mechanical and tribological properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering
期刊论文
Surface and Coatings Technology, 2011, 卷号: 205, 页码: 3058-3065
Authors:
Wang YJ(王永军)
;
Li HX(李红轩)
;
Ji L(吉利)
;
Zhao F(赵飞)
;
Kong QH(孔庆花)
;
Wang YX(王永霞)
;
Liu XH(刘晓红)
;
Quan WL(权伟龙)
;
Zhou HD(周惠娣)
;
Chen JM(陈建敏)
Adobe PDF(1807Kb)
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Submit date:2012/09/24
Unbalanced Magnetron Sputtering
Bias Voltage
Graphite-like Carbon FIlm
Microstructure
Tribological Properties
Influence of substrate bias voltage on the microstructure and residual stress of CrN films deposited by medium frequency magnetron sputtering
期刊论文
Materials Science and Engineering B, 2011, 卷号: 176, 页码: 850-854
Authors:
Gong QH(巩清华)
;
Ji L(吉利)
;
Li HX(李红轩)
;
Liu XH(刘晓红)
;
Wang YJ(王永军)
;
Chen JM(陈建敏)
;
Zhou HD(周惠娣)
Adobe PDF(519Kb)
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View/Download:295/3
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Submit date:2012/09/24
Crn FIlms
Medium Frequency Magnetron Sputterin
Substrate Bias Voltage
Microstructure
Residual Stress