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Argon ion beam assisted magnetron sputtering deposition of boron-doped a-Si:H thin films with improved conductivity 期刊论文
Journal of Non-Crystalline Solids, 2013, 卷号: 378, 页码: 177-180
Authors:  Wang LQ(王凌倩);  Wang, Weiyan;  Huang, Junjun;  Zeng, Yuheng;  Tan, Ruiqin;  Song, Weijie;  Chen JM(陈建敏);  Chen JM(陈建敏)
Adobe PDF(553Kb)  |  Favorite  |  View/Download：108/1  |  Submit date：2015/10/19
Argon Ion Beam Assisted Magnetron Sputtering  Boron-doped A-si:h Thin Film  Dark Conductivity  
Correlation between nitrogen incorporation and structural modification of hydrogenated carbon nitride films 期刊论文
Journal of Non-Crystalline Solids, 2008, 卷号: 354, 页码: 1608-1614
Authors:  Wang CB(王成兵);  Yang SR(杨生荣);  Zhang JY(张俊彦)
Adobe PDF(390Kb)  |  Favorite  |  View/Download：285/5  |  Submit date：2013/03/28
Diamond-like Carbon  
Effect of N2/CH4 flow ratio on microstructure and composition of hydrogenated carbon nitride films prepared by a dual DC-RF plasma system 期刊论文
Journal of Non-Crystalline Solids, 2007, 卷号: 353, 页码: 136-142
Authors:  Hao JY(郝俊英);  Liu WM(刘维民);  Xue QJ(薛群基)
Adobe PDF(201Kb)  |  Favorite  |  View/Download：273/2  |  Submit date：2013/11/01
Films And Coatings  Chemical Vapor Deposition  Plasma Deposition  Vapor Phase Deposition  Hardness  Indentation  Microindentation  Microstructure  Ftir Measurements  Xps