| Correlation between nitrogen incorporation and structural modification of hydrogenated carbon nitride films | |
| Department | 固体润滑国家重点实验室 |
Wang CB(王成兵); Yang SR(杨生荣) ; Zhang JY(张俊彦)
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| 2008 | |
| Source Publication | Journal of Non-Crystalline Solids
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| ISSN | 0022-3093 |
| Volume | 354Pages:1608-1614 |
| Abstract | The growth and microstructure of hydrogenated carbon nitride a-CNx:H (0 6 x 6 0.10) films deposited by PECVD have been studied. Upon the analysis of FTIR spectra, Raman spectra andXPS, it is concluded that p doping could take place even at a very low percentage of nitrogen, which favors the formation of sp2carbon clusters. The C 1s peak shifts toward higher binding energy while theN 1s peak remains constant as the nitrogen content in the filmincreases, which can be considered as a result of the chemical shifts on charge transfer due to the strong electronegativity of the N atom. 3D profile measurements show that there were a great number of particles formed when nitrogen is incorporated in to the films and the particles coalescencewhen the nitrogen content increases due to enhanced surface diffusion. The stress of the films converts from compressive to tensile stress gradually with increased N content. The elimination of grain boundaries and annihilation of excess vacancies, due to columnar structure increasing by diffusion leads to volume shrinkage of the film, thus causing tensile stress. These analyses were fairly consistent to help understand the effects of nitrogen in hydrogenated carbon films. |
| Keyword | Diamond-like Carbon |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the National Natural Science Foundation of China (Grant Nos. 50572108;50323007);the ‘Hundred Talents Program’ of Chinese Academy of Sciences |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 聚合物摩擦学组 ; 纳米润滑研究组 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/2640 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Yang SR(杨生荣); Zhang JY(张俊彦) |
| Recommended Citation GB/T 7714 | Wang CB,Yang SR,Zhang JY. Correlation between nitrogen incorporation and structural modification of hydrogenated carbon nitride films[J]. Journal of Non-Crystalline Solids,2008,354:1608-1614. |
| APA | 王成兵,杨生荣,&张俊彦.(2008).Correlation between nitrogen incorporation and structural modification of hydrogenated carbon nitride films.Journal of Non-Crystalline Solids,354,1608-1614. |
| MLA | 王成兵,et al."Correlation between nitrogen incorporation and structural modification of hydrogenated carbon nitride films".Journal of Non-Crystalline Solids 354(2008):1608-1614. |
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| 20081608-1614.pdf（390KB） | 开放获取 | License | View Application Full Text | |||
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