固体润滑国家重点实验室（LSL）知识库

We deposit hydrogenated amorphous carbon (a-C:H) films by magnetron sputtering of graphite in an Ar + C₂H₂ mixture at various bias voltages. The mechanical properties, Raman spectra, and high-vacuum frictional behaviors of the a-C:H films indicate that the films deposited at bias 0, -50, and -100 V are polymer-like carbon (PLC) films and the film deposited at -150 V is a diamond-like carbon (DLC) film. The lifetimes of superlubricity, with friction coefficient similar to 0.002, of the PLC films in high-vacuum increase from 10000 to 28000 cycles with increasing bias, although the film thicknesses decrease. The DLC film's wear-life is similar to 600 cycles. The enhanced wear resistance in PLC films is attributed to improvement of the crosslinking degree of the PLC network and the film compactness.