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The role of methane in the formation of fullerene-like nanostructure in amorphous carbon film deposited by reactive magnetron sputtering 期刊论文
Diamond & Related Materials, 2020, 期号: 109, 页码: 108018
Authors:  Pei LL(裴露露);  Ju PF(鞠鹏飞);  Ji L(吉利);  Li HX(李红轩);  Liu XH(刘晓红);  Xue DS(薛德胜);  Zhou HD(周惠娣);  Chen JM(陈建敏)
Adobe PDF(2891Kb)  |  Favorite  |  View/Download：62/0  |  Submit date：2020/12/03
Methane  Target poisoning  Fullerene-like nanostructure  Hydrogenated carbon films  Reactive magnetron sputtering  
反应磁控溅射制备AlN薄膜及其耐腐蚀性能研究 学位论文
工学硕士, 北京: 中国科学院大学, 2018
Authors:  王雄伟
Adobe PDF(5516Kb)  |  Favorite  |  View/Download：147/2  |  Submit date：2019/10/31
反应磁控溅射  AlN薄膜  腐蚀  极化曲线  电化学阻抗谱  Reactive magnetron sputtering  AlN film  Corrosion  Polarization curve  Electrochemical impedance spectroscopy  
Bias voltage dependence of superlubricity lifetime of hydrogenated amorphous carbon films in high vacuum 期刊论文
Tribology International, 2018, 卷号: 117, 页码: 107-111
Authors:  Cui LC(崔龙辰);  Zhou, Hui;  Zhang, Kaifeng;  Lu ZB(鲁志斌);  Wang, Xianrong
Adobe PDF(788Kb)  |  Favorite  |  View/Download：132/3  |  Submit date：2017/12/18
Polymer-like Carbon Film  Reactive Magnetron Sputtering  Superlubricity  Bias Voltage