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等离子体增强化学气相沉积法制备非晶氮化碳薄膜及其性能研究 学位论文
: 中国科学院研究生院, 2006
Authors:  郝俊英
Adobe PDF(4821Kb)  |  Favorite  |  View/Download：331/2  |  Submit date：2013/05/24
A-cnxh 薄膜  Pecvd  硬度  弹性模量  耐热耐蚀性  摩擦磨损行为  A-cnxh Films  Hardness And Elastic Modulus  Thermal Stability And Corrosion-resistant Properties  Friction And Wear Behavior  
Influence of flow ratio on mechanical and tribological properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD 期刊论文
Journal of Physics D: Applied Physics, 2006, 卷号: 39, 页码: 1149–1155
Authors:  Hao JY(郝俊英);  Xu T(徐洮);  Zhang JY(张俊彦);  Liu WM(刘维民);  Liu WM(刘维民)
Adobe PDF(522Kb)  |  Favorite  |  View/Download：175/1  |  Submit date：2014/12/23
Preparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasms system 期刊论文
Materials and Science Engineering A, 2005, 卷号: 408, 页码: 297-302
Authors:  Hao JY(郝俊英);  Xu T(徐洮);  Liu WM(刘维民);  Liu WM(刘维民)
Adobe PDF(295Kb)  |  Favorite  |  View/Download：201/1  |  Submit date：2014/12/23
Carbon Nitride Films  Pecvd  Composition  Mechanical Properties