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Low temperature preparation of transparent, antireflective TiO2 films deposited at different O-2/Ar ratios by microwave electron cyclotron resonance magnetron sputtering 期刊论文
Vacuum, 2012, 卷号: 86, 期号: 9, 页码: 1387-1392
Authors:  Du W(杜雯);  Ye YP(冶银平);  Li HX(李红轩);  Zhao F(赵飞);  Ji L(吉利);  Quan WL(权伟龙);  Chen JM(陈建敏);  Zhou HD(周惠娣);  Chen JM(陈建敏)
Adobe PDF(978Kb)  |  Favorite  |  View/Download：416/4  |  Submit date：2013/07/12
Titanium Oxide Thin Film  Mw-ecr  O-2/ar Ratio  Antireflection  
Microstructure, mechanical and tribological properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering 期刊论文
Surface and Coatings Technology, 2011, 卷号: 205, 页码: 3058-3065
Authors:  Wang YJ(王永军);  Li HX(李红轩);  Ji L(吉利);  Zhao F(赵飞);  Kong QH(孔庆花);  Wang YX(王永霞);  Liu XH(刘晓红);  Quan WL(权伟龙);  Zhou HD(周惠娣);  Chen JM(陈建敏)
Adobe PDF(1807Kb)  |  Favorite  |  View/Download：390/1  |  Submit date：2012/09/24
Unbalanced Magnetron Sputtering  Bias Voltage  Graphite-like Carbon FIlm  Microstructure  Tribological Properties