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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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Source Publication:Applied Surface Science
Creator:范晓彦
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Date Issued:2007
Language:英语
Funding Organization:National Natural Science Foundation of China (Grant no. 60376039)
Community:固体润滑国家重点实验室(LSL)
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Research on the properties of ZnO thin films deposited by using filtered cathodic arc plasma technique on glass substrate under different flow rate of O2
期刊论文
Applied Surface Science, 2007, 卷号: 253, 页码: 4000-4005
Authors:
Li C(李春)
;
Li XC(李晓春)
;
Yan PX(阎鹏勋)
;
Chong EM(崇二敏)
;
Liu Y(刘洋)
;
Yue GH(岳光辉)
;
Fan XY(范晓彦)
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Submit date:2013/11/01
Zno Thin Films
Filtered Cathodic Arc Plasma
Tensile Stress
Electrical Resistivity
Photoluminescence