Effect of applied dc bias voltage on the composition, chemical bonding and mechanical properties of carbon nitride films prepared by PECVD

	Effect of applied dc bias voltage on the composition, chemical bonding and mechanical properties of carbon nitride films prepared by PECVD
Department	固体润滑国家重点实验室
	Li HX(李红轩); Xu T(徐洮); Hao JY(郝俊英); Chen JM(陈建敏); Zhou HD(周蕙娣); Xue QJ(薛群基); Liu HW(刘惠文)
	2004
Source Publication	Transactions of Nonferrous Metals Society of China
Volume	14 Pages:222-228
Subject Area	材料科学与物理化学
Language	英语
compositor	第一作者单位
Document Type	期刊论文
Identifier	http://ir.licp.cn/handle/362003/7044
Collection	固体润滑国家重点实验室（LSL）
Recommended Citation GB/T 7714	Li HX,Xu T,Hao JY,et al. Effect of applied dc bias voltage on the composition, chemical bonding and mechanical properties of carbon nitride films prepared by PECVD[J]. Transactions of Nonferrous Metals Society of China,2004,14:222-228.
APA	Li HX.,Xu T.,Hao JY.,Chen JM.,Zhou HD.,...&Liu HW.(2004).Effect of applied dc bias voltage on the composition, chemical bonding and mechanical properties of carbon nitride films prepared by PECVD.Transactions of Nonferrous Metals Society of China,14,222-228.
MLA	Li HX,et al."Effect of applied dc bias voltage on the composition, chemical bonding and mechanical properties of carbon nitride films prepared by PECVD".Transactions of Nonferrous Metals Society of China 14(2004):222-228.

Related Services

Bookmark

Google Scholar

Similar articles in Bing Scholar

Terms of Use

No data!

Social Bookmark/Share

File name:	0-2004-首页.png
Format:	image/png

All comments (0)

No comment.

The comment function is only available to registered usersLog In

If you have any objections to this item, please fill out the form below and the administrator will contact you as soon as possible.
Content:
Email：	*
Institution:
Verification Code:	Refresh

Any comments and suggestions are welcomed.
Title:	*
Content:
Email：	*
Verification Code:	Refresh

固体润滑国家重点实验室（LSL）知识库