Effect of applied dc bias voltage on the composition, chemical bonding and mechanical properties of carbon nitride films prepared by PECVD | |
Department | 固体润滑国家重点实验室 |
Li HX(李红轩); Xu T(徐洮); Hao JY(郝俊英); Chen JM(陈建敏); Zhou HD(周蕙娣); Xue QJ(薛群基); Liu HW(刘惠文) | |
2004 | |
Source Publication | Transactions of Nonferrous Metals Society of China |
Volume | 14Pages:222-228 |
Subject Area | 材料科学与物理化学 |
Language | 英语 |
compositor | 第一作者单位 |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/7044 |
Collection | 固体润滑国家重点实验室(LSL) |
Recommended Citation GB/T 7714 | Li HX,Xu T,Hao JY,et al. Effect of applied dc bias voltage on the composition, chemical bonding and mechanical properties of carbon nitride films prepared by PECVD[J]. Transactions of Nonferrous Metals Society of China,2004,14:222-228. |
APA | Li HX.,Xu T.,Hao JY.,Chen JM.,Zhou HD.,...&Liu HW.(2004).Effect of applied dc bias voltage on the composition, chemical bonding and mechanical properties of carbon nitride films prepared by PECVD.Transactions of Nonferrous Metals Society of China,14,222-228. |
MLA | Li HX,et al."Effect of applied dc bias voltage on the composition, chemical bonding and mechanical properties of carbon nitride films prepared by PECVD".Transactions of Nonferrous Metals Society of China 14(2004):222-228. |
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