Low temperature deposited Ag films exhibiting highly preferred orientations | |
Department | 先进润滑与防护材料研究发展中心 |
Gao XM(高晓明); Hu M(胡明); Fu YL(伏彦龙); Weng LJ(翁立军); Liu WM(刘维民); Sun JY(孙嘉奕); Sun JY(孙嘉奕) | |
The second department | 固体润滑国家重点实验室 |
2018 | |
Source Publication | Materials Letters |
ISSN | 0167-577X |
Volume | 213Issue:0Pages:178-180 |
Abstract | Due to the crystal anisotropy, highly oriented films normally exhibit unique properties and performances. In this paper, Ag films were deposited using arc ion plating (AIP) at different substrate temperatures, substrate bias voltages and Ar pressures, and the relationship between the preferred orientation and deposition parameter of the films was investigated. The results exhibited that the preferred orientation of Ag films was influenced significantly by the deposition parameter due to the competition between the surface- and strain-energy minimization, and so both Ag films that exhibited highly preferred orientations of (1 1 1) and (2 0 0), respectively, were obtained at the optimum conditions. The relatively low friction was observed from the Ag film with highly preferred orientations of (1 1 1) because the (1 1 1) plane was the slip plane of face-centred cubic crystals. |
Keyword | Physical Vapour Deposition Crystal Structure Thin Films Low Temperature |
Subject Area | 材料科学与物理化学 |
DOI | 10.1016/j.matlet.2017.11.074 |
Funding Organization | National Science Foundation of China [Grant No. 51575508] |
Indexed By | SCI |
If | 2.687 |
Language | 英语 |
Funding Project | PVD润滑薄膜研究组 ; 空间润滑材料研究组 |
compositor | 第一作者单位 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/22835 |
Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室(LSL) |
Corresponding Author | Sun JY(孙嘉奕) |
Affiliation | State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
Recommended Citation GB/T 7714 | Gao XM,Hu M,Fu YL,et al. Low temperature deposited Ag films exhibiting highly preferred orientations[J]. Materials Letters,2018,213(0):178-180. |
APA | Gao XM.,Hu M.,Fu YL.,Weng LJ.,Liu WM.,...&Sun JY.(2018).Low temperature deposited Ag films exhibiting highly preferred orientations.Materials Letters,213(0),178-180. |
MLA | Gao XM,et al."Low temperature deposited Ag films exhibiting highly preferred orientations".Materials Letters 213.0(2018):178-180. |
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Low temperature depo(662KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text |
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