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Structure evolution and mechanical properties enhancement of Al/AlN multilayer 期刊论文
Applied Surface Science, 2007, 卷号: 253, 页码: 8835-8840
Authors:  Zhang GA(张广安);  Wu ZG(吴志国);  Wang MX(王明旭);  Fan XY(范晓彦);  Wang J(王君);  Yan PX(阎鹏勋)
Adobe PDF(869Kb)  |  Favorite  |  View/Download：88/0  |  Submit date：2013/11/01
Magnetron Sputtering  Al/aln Multilayer  Structure  Hardness  Wear Properties  
Ti-doped copper nitride films deposited by cylindrical magnetron sputtering 期刊论文
Journal of Alloys and Compounds, 2007, 卷号: 440, 页码: 254-258
Authors:  Fan XY(范晓彦);  Wu ZG(吴志国);  Zhang GA(张广安);  Li C(李春);  Geng BS(耿柏松);  Li HJ(李华军);  Yan PX(阎鹏勋)
Adobe PDF(881Kb)  |  Favorite  |  View/Download：108/0  |  Submit date：2013/11/01
Copper Nitride  Surface Morphology  Electrical Resistivity  Optical Band Gap  
The preparation and mechanical properties of Al-containing a-C:H thin films 期刊论文
Journal of Physics D: Applied Pysics, 2007, 卷号: 40, 页码: 6748-6753
Authors:  Zhang GA(张广安);  Yan PX(阎鹏勋);  Wang P(王鹏);  Chen YM(陈友明);  Zhang JY(张俊彦)
Adobe PDF(618Kb)  |  Favorite  |  View/Download：124/3  |  Submit date：2013/11/01
Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films 期刊论文
Materials Science and Engineering A, 2007, 卷号: 460-461, 页码: 301-305
Authors:  Zhang GA(张广安);  Yan PX(阎鹏勋);  Wang P(王鹏);  Chen YM(陈友明);  Zhang JY(张俊彦)
Adobe PDF(358Kb)  |  Favorite  |  View/Download：291/3  |  Submit date：2013/11/01
Twin Target Medium Frequency Magnetron Sputtering  Crnx Films  Deposition Rate  Structure  Wear Properties