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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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固体润滑国家重点实验... [4]
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2014 [4]
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甲烷流量对中频磁控溅射制备TiSi-C:H薄膜生长和性能的影响(英文)
期刊论文
稀有金属材料与工程, 2014, 卷号: 43, 期号: 10, 页码: 2305-2310
Authors:
姜金龙
;
陈娣
;
王琼
;
黄浩
;
朱维君
;
郝俊英
Adobe PDF(937Kb)
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View/Download:126/0
  |  
Submit date:2016/02/15
A-c:h Films
Middle-frequency Magnetron Sputtering
Mechanical Property
Tribological Property
A-c:H薄膜
中频磁控溅射
力学性能
摩擦性能
紫外光辐照下钛硅共掺杂类金刚石薄膜微结构的演化
期刊论文
无机材料学报, 2014, 卷号: 29, 期号: 9, 页码: 941-946
Authors:
姜金龙
;
王琼
;
黄浩
;
张霞
;
王玉宝
;
耿庆芬
Adobe PDF(823Kb)
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View/Download:103/1
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Submit date:2016/10/11
类金刚石薄膜
紫外光辐照
拉曼光谱
红外光谱
结构演化
Diamond-like Carbon Film
Ultraviolet Light Irradiation
Raman Spectra
Ftir Spectra
Microstructural Evolution
沉积温度对钛硅共掺杂类金刚石薄膜生长、结构和力学性能的影响
期刊论文
物理学报, 2014, 卷号: 63, 期号: 2, 页码: 028104(1-7)
Authors:
姜金龙
;
黄浩
;
王琼
;
王善民
;
魏智强
;
杨华
;
郝俊英
Adobe PDF(1256Kb)
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View/Download:251/6
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Submit date:2014/12/17
类金刚石薄膜
共掺杂
沉积温度
结构与性能
Diamond-like Carbon Film
Deposition Temperature
Co-doping
Structure And Properties
氩离子溅射刻蚀对Ti-Si-C纳米复合薄膜XPS分析的影响
期刊论文
稀有金属材料与工程, 2014, 卷号: 43, 期号: 4, 页码: 977-981
Authors:
姜金龙
;
陈娣
;
王琼
;
杨华
;
魏智强
Adobe PDF(560Kb)
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View/Download:164/1
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Submit date:2015/10/26
Ti-si-c Nanocomposite Films
Ar++ Sputter-etching
Xps
Bonding Configurations