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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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低维材料摩擦学组 [1]
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Indexed By:SCI
Source Publication:Journal of Non-Crystalline Solids
Creator:刘维民
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Creator:薛群基
Funding Project:低维材料摩擦学组
Funding Project:空间润滑材料组
Document Type:期刊论文
Author:薛群基
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Effect of N2/CH4 flow ratio on microstructure and composition of hydrogenated carbon nitride films prepared by a dual DC-RF plasma system
期刊论文
Journal of Non-Crystalline Solids, 2007, 卷号: 353, 页码: 136-142
Authors:
Hao JY(郝俊英)
;
Liu WM(刘维民)
;
Xue QJ(薛群基)
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Submit date:2013/11/01
Films And Coatings
Chemical Vapor Deposition
Plasma Deposition
Vapor Phase Deposition
Hardness
Indentation
Microindentation
Microstructure
Ftir Measurements
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