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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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Creator:chenyouming分陈友明
Creator:张君英
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Creator:张广安
Creator:王鹏
Creator:阎鹏勋
Date Issued:2008
Funding Project:低维材料摩擦学组
Funding Project:纳米润滑研究组
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The effect of applied substrate negative bias voltage on the structure and properties of Al-containing a-C:H thin films
期刊论文
Surface and Coatings Technology, 2008, 卷号: 202, 页码: 2684-2689
Authors:
Zhang GA(张广安)
;
Yan PX(阎鹏勋)
;
Wang P(王鹏)
;
Chen YM(陈友明)
;
Zhang JY(张君英)
;
Wang LP(王立平)
;
Zhang JY(张俊彦)
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Submit date:2013/03/28
Al-containing Hydrogenated Amorphous Carbon
Magnetron Sputtering
Applied Substrate Pulse Bias
Hardness
Wear Test