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The correlation between nano-hardness and elasticity and fullerene-like clusters in hydrogenated amorphous carbon films 期刊论文
Chemical Physics Letters, 2018, 卷号: 692, 期号: 0, 页码: 258-263
Authors:  Wang YF(王永富);  Gao KX(高凯雄);  Wang, Qi;  Zhang JY(张俊彦);  Zhang JY(张俊彦)
Adobe PDF(2031Kb)  |  Favorite  |  View/Download：186/5  |  Submit date：2018/06/11
Fullerene-like  Hardness  Amorphous Carbon  Chemical Vapor Deposition  h Bonded Sites  
In-situ stress suppression of hydrogenated a-CNx film prepared via Ar gas introduction 期刊论文
Surface and Interface Analysis, 2017, 卷号: 49, 期号: 5, 页码: 370-375
Authors:  Wang, Qi;  He, Deyan;  Zhang JY(张俊彦)
Adobe PDF(434Kb)  |  Favorite  |  View/Download：127/4  |  Submit date：2017/05/10
Amorphous Carbon  Carbon Nitride Films  Stress  Raman