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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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无机材料学报 [1]
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先进固体润滑膜组 [1]
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国家自然科学基金(5... [1]
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孙蓉 [1]
寇冠涛 [1]
徐洮 [1]
薛群基 [1]
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中文 [1]
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2005 [1]
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Indexed By:CSCD
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Creator:孙蓉
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Creator:薛群基
Document Type:期刊论文
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氩离子注入单晶硅表面的微观结构和微观力学性能研究
期刊论文
无机材料学报, 2005, 卷号: 20, 期号: 3, 页码: 759-763
Authors:
孙蓉
;
徐洮
;
寇冠涛
;
薛群基
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Submit date:2014/03/03
单晶硅
氩离子注入
纳米划痕
断裂韧性
Single-crystal Silicon
Ar++ Implantation
Nano-scratch
Fracture Toughness