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| Effect of deposition pressure on the adhesion and tribological properties of a-CNxH films prepared by DC-RF-PECVD 期刊论文 Journal of Materials Science, 2008, 卷号: 43, 页码: 645-651 Authors: Ding J(丁军); Hao JY(郝俊英) ; Xue QJ(薛群基) ; Liu WM(刘维民)![](/image/person.jpg)
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| The effect of hydrogen on copper nitride thin films deposited by magnetron sputtering 期刊论文 Applied Surface Science, 2008, 卷号: 254, 页码: 5012-5015 Authors: Zhang GA(张广安) ; Yan PX(阎鹏勋); Wu ZG(吴志国); Wang J(王君); Chen JT(陈江涛)![](/image/person.jpg)
Adobe PDF(574Kb)  |   Favorite  |  View/Download:80/0  |  Submit date:2013/03/28 Copper Nitride Thin FIlms Hydrogen Structure Thermal Properties |
| 中频磁控溅射沉积含铝类金刚石碳膜结构及其摩擦磨损性能研究 期刊论文 摩擦学学报, 2008, 卷号: 28, 期号: 2, 页码: 118-122 Authors: 张广安 ; 王鹏 ; 陈友明; 王霞; 阎鹏勋; 张俊彦![](/image/person.jpg)
Adobe PDF(603Kb)  |   Favorite  |  View/Download:146/3  |  Submit date:2013/03/28 中频磁控溅射 Al-dlc薄膜 摩擦磨损性能 Medium Frequency Magnetron Sputtering Al-dlc Thin Films Tribological Properties |
| The effect of applied substrate negative bias voltage on the structure and properties of Al-containing a-C:H thin films 期刊论文 Surface and Coatings Technology, 2008, 卷号: 202, 页码: 2684-2689 Authors: Zhang GA(张广安) ; Yan PX(阎鹏勋); Wang P(王鹏) ; Chen YM(陈友明); Zhang JY(张君英); Wang LP(王立平) ; Zhang JY(张俊彦)![](/image/person.jpg)
Adobe PDF(1278Kb)  |   Favorite  |  View/Download:138/2  |  Submit date:2013/03/28 Al-containing Hydrogenated Amorphous Carbon Magnetron Sputtering Applied Substrate Pulse Bias Hardness Wear Test |