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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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中国科学院材料磨损与... [1]
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磨损和表面工程组 [1]
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王永霞 [1]
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2011 [1]
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Creator:王永霞
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Date Issued:2011
Document Type:学位论文
Community:中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心
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磁控溅射法制备含氢非晶碳膜及其结构和性能研究
学位论文
: 中国科学院研究生院, 2011
Authors:
王永霞
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Submit date:2012/11/09
含氢非晶碳膜
磁控溅射法
内应力
热稳定性
Hydrogenated Amorphous Carbon Film
Magnetron Sputtering
Internal Stress
Thermal Stability