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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
中国科学院材料磨损与... [1]
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功能材料 [1]
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Creator:lihongxuan分李红轩
Creator:邱孟柯
First author
Creator:黄小鹏
Language:中文
Funding Organization:国家自然科学基金资助项目(51065001)
Funding Project:磨损与表面工程课题组
Document Type:期刊论文
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N2 流量对中频非平衡磁控溅射TiAlN薄膜结构及性能的影响
期刊论文
功能材料, 2013, 卷号: 44, 期号: 1, 页码: 32-35
Authors:
吴劲峰
;
何乃如
;
邱孟柯
;
吉利
;
李红轩
;
黄小鹏
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Submit date:2013/12/10
磁控溅射
Tialn 薄膜
N2 流量
微观结构
硬度
Magnetron Sputtering
Tialn Films
Nitrogen Flow
Microstructure
Hardness