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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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Source Publication:Surface & Coatings Technology
Creator:chenjianmin分陈建敏
Creator:吉利
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Creator:陈建敏
Date Issued:2012
Funding Project:磨损和表面工程组
Document Type:期刊论文
Community:固体润滑国家重点实验室(LSL)
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The structure and properties of CrAlN films deposited by mid-frequency unbalanced magnetron sputtering at different substrate bias duty cycles
期刊论文
Surface & Coatings Technology, 2012, 卷号: 206, 期号: 19-20, 页码: 3961-3969
Authors:
Lv YH(吕艳红)
;
Ji L(吉利)
;
Liu XH(刘晓红)
;
Li HX(李红轩)
;
Zhou HD(周惠娣)
;
Chen JM(陈建敏)
;
Li HX(李红轩)
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Submit date:2013/07/12
Craln Films
Microstructure Hardness
Thermal Stability