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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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中国科学院材料磨损与... [1]
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Diamond & ... [1]
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刘晓红 [1]
吉利 [1]
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Source Publication:Diamond & Related Materials
Creator:吉利
First author
Creator:薛德胜
Creator:裴露露
Creator:陈建敏
Creator:鞠鹏飞
Date Issued:2020
Language:英语
Document Type:期刊论文
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The role of methane in the formation of fullerene-like nanostructure in amorphous carbon film deposited by reactive magnetron sputtering
期刊论文
Diamond & Related Materials, 2020, 期号: 109, 页码: 108018
Authors:
Pei LL(裴露露)
;
Ju PF(鞠鹏飞)
;
Ji L(吉利)
;
Li HX(李红轩)
;
Liu XH(刘晓红)
;
Xue DS(薛德胜)
;
Zhou HD(周惠娣)
;
Chen JM(陈建敏)
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Submit date:2020/12/03
Methane
Target poisoning
Fullerene-like nanostructure
Hydrogenated carbon films
Reactive magnetron sputtering