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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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低维材料摩擦学组 [1]
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Source Publication:Applied Surface Science
Creator:张广安
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Funding Organization:Natural Science Foundation of China (Granted No 50772115)
Funding Project:低维材料摩擦学组
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The effect of hydrogen on copper nitride thin films deposited by magnetron sputtering
期刊论文
Applied Surface Science, 2008, 卷号: 254, 页码: 5012-5015
Authors:
Zhang GA(张广安)
;
Yan PX(阎鹏勋)
;
Wu ZG(吴志国)
;
Wang J(王君)
;
Chen JT(陈江涛)
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Submit date:2013/03/28
Copper Nitride
Thin FIlms
Hydrogen
Structure
Thermal Properties