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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
中国科学院材料磨损与... [1]
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物理学报 [1]
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磨损和表面工程组 [1]
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2012 [1]
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Indexed By:SCI
Creator:chenjianmin分陈建敏
Creator:刘晓红
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Creator:吉利
Creator:吴艳霞
Creator:王永军
Language:中文
Funding Project:磨损和表面工程组
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非平衡磁控溅射制备类石墨碳膜及性能研究
期刊论文
物理学报, 2012, 卷号: 61, 期号: 5, 页码: 056103(1-7)
Authors:
王永军
;
李红轩
;
吉利
;
刘晓红
;
吴艳霞
;
周惠娣
;
陈建敏
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Submit date:2013/07/12
磁控溅射
类石墨碳膜
微观结构
性能
Magnetron Sputtering
Graphite-like Carbon Film
Microstructure
Performance