| Effect of different ion beam energy on properties of amorphous carbon film fabricated by ion beam sputtering deposition (IBSD) | |
| Department | 固体润滑国家重点实验室 |
Bai LC(白利春); Zhang GA(张广安) ; Wu ZG(吴志国); Wang J(王君); Yan PX(阎鹏勋)
| |
| 2011 | |
| Source Publication | Nuclear Instruments and Methods in Physics Research B
 |
| ISSN | 0168-583X |
| Volume | 269Pages:1871-1877 |
| Abstract | Amorphous carbon (a-C) films were fabricated by ion beam sputtering technique. The influence of sput- tering ion beam energy on bonding structure, morphologic, mechanical properties, tribological properties and corrosion resistance of a-C films are investigated systematically. Morphology study shows that low- est surface roughness exists for mid-ion beam energy. Improved adhesion is observed for the films that are prepared under high ion beam energy, attributed to film graphitization, low residual stress and mixed interface. Relatively, a-C films prepared with ion beam energy of 2 keV exhibits optimum sp3 bond con- tent, mechanical properties and corrosion resistance. It is found that the wear rate of DLC films decrease with increased ion beam energy in general, consistent with the varied trend of the H/E value which has been regarded as a suitable parameter for predicting wear resistance of the coatings. The correlation of the sp3 bond fraction in the films estimated from Raman spectroscopy with residual stress, nanohardness and corrosion resistance has been established. |
| Keyword | Hydrogen-free Amorphous Carbon (A-c) FIlms Ion Beam Sputtering depositIon (Ibsd) Ion Beam Energy Structure Properties |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | Youth Science Fund of the National Nature Science Foundation (NO.11004203) |
| Indexed By | SCI |
| Language | 英语 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/803 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Yan PX(阎鹏勋) |
| Recommended Citation GB/T 7714 | Bai LC,Zhang GA,Wu ZG,et al. Effect of different ion beam energy on properties of amorphous carbon film fabricated by ion beam sputtering deposition (IBSD)[J]. Nuclear Instruments and Methods in Physics Research B,2011,269:1871-1877. |
| APA | 白利春,张广安,吴志国,王君,&阎鹏勋.(2011).Effect of different ion beam energy on properties of amorphous carbon film fabricated by ion beam sputtering deposition (IBSD).Nuclear Instruments and Methods in Physics Research B,269,1871-1877. |
| MLA | 白利春,et al."Effect of different ion beam energy on properties of amorphous carbon film fabricated by ion beam sputtering deposition (IBSD)".Nuclear Instruments and Methods in Physics Research B 269(2011):1871-1877. |
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