Comparative study on structure and properties of titanium/silicon mono- and co-doped amorphous carbon films deposited by mid-frequency magnetron sputtering

doi:10.1002/sia.5361

	Comparative study on structure and properties of titanium/silicon mono- and co-doped amorphous carbon films deposited by mid-frequency magnetron sputtering
Department	固体润滑国家重点实验室
	Jiang JL(姜金龙)1; Huang H(黄浩)1; Wang Q(王琼)1; Zhu WJ(朱伟军)1; Hao JY(郝俊英)2 ; Liu WM(刘维民)2 ; Jiang JL(姜金龙)
	2014
Source Publication	Surface and Interface Analysis
ISSN	0142-2421
Volume	46 Issue:3 Pages:139-144
Abstract	The titanium/silicon mono- and co-doped amorphous carbon films were deposited by mid-frequency magnetron sputtering Ti target, Si target, and Ti80S20 alloy target, respectively. The effects of doped elements on the composition, surface morphology, microstructure, and mechanical and tribological properties of the films were investigated. The results reveal that the ratio of sp³ and sp² carbon bonds of the films is regulated between 0.28 and 0.62 by a combination of Ti and Si dopant. The addition of small amounts of silicon leads to an increase in sp³ bonds and disorder degree of the sp² carbon. The co-doped film exhibits significantly superior friction performance than the mono-doped films. The ultra-low friction (μ<0.01) was achieved under a load of 2N in ambient air with 40% RH. By comparing to the mono-and co-doped films, it is thought that the sp³/sp² ratio of the films may play a key role for the superlow friction.
Keyword	A-c:h Films Co-doping Microstructure Tribological Properties
Subject Area	材料科学与物理化学
DOI	10.1002/sia.5361
Funding Organization	the Natural Science Foundation of China (51105186);the Nature Science Foundation of Gansu Province (1014RJZA007);the Excellent Young Teachers Program of Lanzhou University of Technology (1010ZCX010);the Doctoral Research grant of Lanzhou University of Technology
Indexed By	SCI
If	1.245
Language	英语
Funding Project	空间润滑材料组
compositor	第二作者单位
Citation statistics	Cited Times:9[WOS] [WOS Record] [Related Records in WOS]
Document Type	期刊论文
Identifier	http://ir.licp.cn/handle/362003/6993
Collection	固体润滑国家重点实验室（LSL）
Corresponding Author	Jiang JL(姜金龙)
Affiliation	1.Lanzhou Univ Technol, Dept Phys, Lanzhou 730050, Peoples R China 2.Chinese Acad Sci, State Key Lab Solid Lubricat, Lanzhou Inst Chem Phys, Lanzhou 730000, Peoples R China
Recommended Citation GB/T 7714	Jiang JL,Huang H,Wang Q,et al. Comparative study on structure and properties of titanium/silicon mono- and co-doped amorphous carbon films deposited by mid-frequency magnetron sputtering[J]. Surface and Interface Analysis,2014,46(3):139-144.
APA	Jiang JL.,Huang H.,Wang Q.,Zhu WJ.,Hao JY.,...&姜金龙.(2014).Comparative study on structure and properties of titanium/silicon mono- and co-doped amorphous carbon films deposited by mid-frequency magnetron sputtering.Surface and Interface Analysis,46(3),139-144.
MLA	Jiang JL,et al."Comparative study on structure and properties of titanium/silicon mono- and co-doped amorphous carbon films deposited by mid-frequency magnetron sputtering".Surface and Interface Analysis 46.3(2014):139-144.

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