| Influence of Applied Bias Voltage on the Composition, Structure, and Properties of Ti:Si-Codoped a-C:H Films Prepared by Magnetron Sputtering | |
| Department | 固体润滑国家重点实验室 |
Jiang JL(姜金龙)1,2; Wang Q(王琼)1; Wang YB(王玉宝)1; Zhang X(张霞)1; Yang H(杨华)1; Hao JY(郝俊英)2 ; Jiang JL(姜金龙)
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| 2014 | |
| Source Publication | Journal of Nanomaterials
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| ISSN | 1687-4110 |
| Pages | 937068-7 |
| Abstract | The titanium- and silicon-codoped a-C:H films were prepared at different applied bias voltage by magnetron sputtering TiSi target in argon and methane mixture atmosphere. The influence of the applied bias voltage on the composition, surface morphology, structure, and mechanical properties of the films was investigated by XPS, AFM, Raman, FTIR spectroscopy, and nanoindenter. The tribological properties of the films were characterized on an UMT-2MT tribometer. The results demonstrated that the film became smoother and denser with increasing the applied bias voltage up to −200V, whereas surface roughness increased due to the enhancement of ion bombardment as the applied bias voltage further increased. The sp3 carbon fraction in the filmsmonotonously decreased with increasing the applied bias voltage.The film exhibited moderate hardness and the superior tribological properties at the applied bias voltage of −100V.The tribological behaviors are correlated to the H/E or H3/E2 ratio of the films. |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1155/2014/937068 |
| Funding Organization | the Natural Science Foundation of China (51105186);the Excellent Young Teachers Program of Lanzhou University of Technology (1010ZCX010);the Doctoral Research grant of Lanzhou University of Technology |
| Indexed By | SCI |
| If | 1.644 |
| Language | 英语 |
| Funding Project | 空间润滑材料组 |
| compositor | 第二作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/6992 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Jiang JL(姜金龙) |
| Affiliation | 1.Lanzhou Univ Technol, Dept Phys, Lanzhou 730050, Peoples R China 2.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
| Recommended Citation GB/T 7714 | Jiang JL,Wang Q,Wang YB,et al. Influence of Applied Bias Voltage on the Composition, Structure, and Properties of Ti:Si-Codoped a-C:H Films Prepared by Magnetron Sputtering[J]. Journal of Nanomaterials,2014:937068-7. |
| APA | Jiang JL.,Wang Q.,Wang YB.,Zhang X.,Yang H.,...&姜金龙.(2014).Influence of Applied Bias Voltage on the Composition, Structure, and Properties of Ti:Si-Codoped a-C:H Films Prepared by Magnetron Sputtering.Journal of Nanomaterials,937068-7. |
| MLA | Jiang JL,et al."Influence of Applied Bias Voltage on the Composition, Structure, and Properties of Ti:Si-Codoped a-C:H Films Prepared by Magnetron Sputtering".Journal of Nanomaterials (2014):937068-7. |
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| File Name/Size | DocType | Version | Access | License | ||
| 32-2014-Influence of（2112KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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