| TiN/TiCN multilayer films modified by argon plasma treatment | |
| Department | 固体润滑国家重点实验室 |
Zheng JY(郑建云)1,2 ; Hao JY(郝俊英)1; Liu XQ(刘小强)1,2; Gong QY(龚秋雨)1,2; Liu WM(刘维民)1; Hao JY(郝俊英)
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| 2013 | |
| Source Publication | Applied Surface Science
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| ISSN | 0169-4332 |
| Volume | 280Pages:764-771 |
| Abstract | TiN/TiCN multilayer films were deposited under direct current magnetron sputtering, and then were modified by application of an argon plasma process with an 1100 V substrate bias voltage. The combination of X-ray diffraction, field emission scanning electron microscopy and cross-sectional high resolution transmission electron microscopy was used to analyze the change of the film structure after Ar+ ion bombardment. It could be found that with the increase of the treatment time, the interface between the TiN layer and TiCN layer became more and more blurred and the film structure was also denser. Calculations on stress and hardness data had shown that argon plasma treatment considerably enhanced the mechanical properties of the film, which was mainly reflected in the hardness increasing from 21 GPa to 23.2 GPa, due to the creation of dense structure and fine grain. Comparison with original film, plasma-modified film exhibited substantially low friction behaviors and good wear resistance, especially the reduction of friction coefficient of TiN layer. There was a correlation between the excellent tribological properties of the film and the alteration of the film structure. |
| Keyword | Tin/ticn Multilayer Film Argon Plasma Treatment Structure Mechanical And Tribological Properties |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1016/j.apsusc.2013.05.058 |
| Funding Organization | the National Nature Science Foundation of China (50905177);the National 973 Project of China (2013CB632300) |
| Indexed By | SCI |
| If | 2.538 |
| Language | 英语 |
| Funding Project | 空间润滑材料组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/4764 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Hao JY(郝俊英) |
| Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China |
| Recommended Citation GB/T 7714 | Zheng JY,Hao JY,Liu XQ,et al. TiN/TiCN multilayer films modified by argon plasma treatment[J]. Applied Surface Science,2013,280:764-771. |
| APA | Zheng JY,Hao JY,Liu XQ,Gong QY,Liu WM,&郝俊英.(2013).TiN/TiCN multilayer films modified by argon plasma treatment.Applied Surface Science,280,764-771. |
| MLA | Zheng JY,et al."TiN/TiCN multilayer films modified by argon plasma treatment".Applied Surface Science 280(2013):764-771. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| TiNTiCN multilayer f（3875KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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