Low-dielectric, nanoporous polyimide thin films prepared from block copolymer templating
Department先进润滑与防护材料研究发展中心
Wang C(王超); Wang TM(王廷梅); Wang QH(王齐华); Wang QH(王齐华)
The second department固体润滑国家重点实验室
2013
Source PublicationeXPRESS Polymer Letters
ISSN1788-618X
Volume7Issue:8Pages:667-672
AbstractIn this paper, a new method to the preparation of low-dielectric nanoporous polyimide (PI) films was addressed, based on the self-assembly structures of PS-b-P4VP/poly(amic acid) (PAA, precursor of PI) blends. It is found the microphase-separation structure of PS-b-P4VP/PAA is a precondition of the formation of nanoporous structures, which could be achieved by solvent annealing. Nanoporous PI films with spherical pore size of ~11 nm were obtained by thermal imidization followed by the removal of the PS-b-P4VP block copolymer. The porosity of the nanoporous PI films could be controlled by the weight fraction of the PS-b-P4VP block copolymer. The dielectric properties of the nanoporous PI films were studied, and it was found that the introduction of nanopores could effectively reduce the dielectric constant from 3.60 of dense PI films to 2.41 of nanoporous PI films with a porosity of 26%, making it promising in microelectronic devices. The fabrication method described here could be extended to other polymer systems.
KeywordNanomaterials Block Copolymer Dielectric Constant Nanoporous Polyimide Thin Films
Subject Area材料科学与物理化学
DOI10.3144/expresspolymlett.2013.63
Funding Organizationthe National Science Foundation for Distinguished Young Scholars of China (Grant No.51025517);the National Defense Basic Scientific Research Project (A1320110011)
Indexed BySCI
If2.953
Language英语
Funding Project聚合物自润滑复合材料组
compositor第一作者单位
Citation statistics
Cited Times:17[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.licp.cn/handle/362003/4372
Collection中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心
固体润滑国家重点实验室(LSL)
Corresponding AuthorWang QH(王齐华)
AffiliationChinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
Recommended Citation
GB/T 7714
Wang C,Wang TM,Wang QH,et al. Low-dielectric, nanoporous polyimide thin films prepared from block copolymer templating[J]. eXPRESS Polymer Letters,2013,7(8):667-672.
APA Wang C,Wang TM,Wang QH,&王齐华.(2013).Low-dielectric, nanoporous polyimide thin films prepared from block copolymer templating.eXPRESS Polymer Letters,7(8),667-672.
MLA Wang C,et al."Low-dielectric, nanoporous polyimide thin films prepared from block copolymer templating".eXPRESS Polymer Letters 7.8(2013):667-672.
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