Low-dielectric, nanoporous polyimide thin films prepared from block copolymer templating | |
Department | 先进润滑与防护材料研究发展中心 |
Wang C(王超); Wang TM(王廷梅); Wang QH(王齐华); Wang QH(王齐华) | |
The second department | 固体润滑国家重点实验室 |
2013 | |
Source Publication | eXPRESS Polymer Letters |
ISSN | 1788-618X |
Volume | 7Issue:8Pages:667-672 |
Abstract | In this paper, a new method to the preparation of low-dielectric nanoporous polyimide (PI) films was addressed, based on the self-assembly structures of PS-b-P4VP/poly(amic acid) (PAA, precursor of PI) blends. It is found the microphase-separation structure of PS-b-P4VP/PAA is a precondition of the formation of nanoporous structures, which could be achieved by solvent annealing. Nanoporous PI films with spherical pore size of ~11 nm were obtained by thermal imidization followed by the removal of the PS-b-P4VP block copolymer. The porosity of the nanoporous PI films could be controlled by the weight fraction of the PS-b-P4VP block copolymer. The dielectric properties of the nanoporous PI films were studied, and it was found that the introduction of nanopores could effectively reduce the dielectric constant from 3.60 of dense PI films to 2.41 of nanoporous PI films with a porosity of 26%, making it promising in microelectronic devices. The fabrication method described here could be extended to other polymer systems. |
Keyword | Nanomaterials Block Copolymer Dielectric Constant Nanoporous Polyimide Thin Films |
Subject Area | 材料科学与物理化学 |
DOI | 10.3144/expresspolymlett.2013.63 |
Funding Organization | the National Science Foundation for Distinguished Young Scholars of China (Grant No.51025517);the National Defense Basic Scientific Research Project (A1320110011) |
Indexed By | SCI |
If | 2.953 |
Language | 英语 |
Funding Project | 聚合物自润滑复合材料组 |
compositor | 第一作者单位 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/4372 |
Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室(LSL) |
Corresponding Author | Wang QH(王齐华) |
Affiliation | Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
Recommended Citation GB/T 7714 | Wang C,Wang TM,Wang QH,et al. Low-dielectric, nanoporous polyimide thin films prepared from block copolymer templating[J]. eXPRESS Polymer Letters,2013,7(8):667-672. |
APA | Wang C,Wang TM,Wang QH,&王齐华.(2013).Low-dielectric, nanoporous polyimide thin films prepared from block copolymer templating.eXPRESS Polymer Letters,7(8),667-672. |
MLA | Wang C,et al."Low-dielectric, nanoporous polyimide thin films prepared from block copolymer templating".eXPRESS Polymer Letters 7.8(2013):667-672. |
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