Ripple surface generated on hydrogenated amorphous carbon nitride films | |
Department | 固体润滑国家重点实验室 |
Wang CB(王成兵); Yang SR(杨生荣); Zhang JY(张俊彦) | |
2007 | |
Source Publication | Applied Surface Science |
ISSN | 0169-4332 |
Volume | 253Pages:4099-4102 |
Abstract | It is reported for the first time that the periodical ripple surface feature at micrometer-scale was observed on hydrogenated amorphous carbon nitride films deposited by pulse plasma chemical vapor deposition (CVD) technique. Nitrogen incorporation to hydrogenated amorphous carbon films and the different growing environments of pulse dc plasma discharge perhaps played crucial role in the surface morphology transformation of hydrogenated amorphous carbon nitride films. |
Keyword | Carbon Nitride Films Ripple Morphology |
Subject Area | 材料科学与物理化学 |
Funding Organization | the National Science Foundation of China (Grant nos. 50572108;50323007);the “Hundreds Talent Program” of Chinese Academy of Sciences |
Indexed By | SCI |
Language | 英语 |
Funding Project | 聚合物摩擦学组 ; 纳米润滑研究组 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/4101 |
Collection | 固体润滑国家重点实验室(LSL) |
Corresponding Author | Zhang JY(张俊彦) |
Recommended Citation GB/T 7714 | Wang CB,Yang SR,Zhang JY. Ripple surface generated on hydrogenated amorphous carbon nitride films[J]. Applied Surface Science,2007,253:4099-4102. |
APA | 王成兵,杨生荣,&张俊彦.(2007).Ripple surface generated on hydrogenated amorphous carbon nitride films.Applied Surface Science,253,4099-4102. |
MLA | 王成兵,et al."Ripple surface generated on hydrogenated amorphous carbon nitride films".Applied Surface Science 253(2007):4099-4102. |
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