| Elastic properties of a-C:N:H films | |
| Department | 固体润滑国家重点实验室 |
Wang CB(王成兵); Yang SR(杨生荣) ; Li HX(李红轩); Zhang JY(张俊彦)
| |
| 2007 | |
| Source Publication | Journal of Applied Physics
 |
| ISSN | 0021-8979 |
| Volume | 101Pages:013501(1-6) |
| Abstract | Dual dc-rf plasma system has been used to deposit hydrogenated carbon nitride CNx:H films that exhibit high elastic recovery 75% . Transmission electron microscopy TEM , Fourier transform infrared FTIR spectra and Raman spectra were subsequently used to study the microstructure and bonding of the resultant films. The structure of the films from TEM is seen to consist of many particles embedded in an amorphous carbon matrix, and the films can be described as graphitelike or onionlike with interplanar distances of 1.15, 1.95, and 3.5 Å, as obtained from selected area electron diffraction SAED . FTIR shows that nitrogen promotes the formation of sp2 CvC/CvN aromatic rings in the films. Raman spectra shows two apparent peaks at about 700 and 1200 cm−1 in addition to the G and D peaks. Only by adding two extra peaks at approximately 1230 and 1470 cm−1 can we deconvolute the Raman spectra of CNx :H in the region of 1000–2000 cm−1. Combining TEM and SAED, we attribute the three peaks at about 700, 1200, and 1470 cm−1 to fullerene or onion structure. However, the elastic recovery is relatively lower than elastic hydrogenated free carbon nitride films. We think that this is due to the fact that hydrogen is mainly incorporated to sp3 carbon and suppresses cross-linking three-dimensional 3D network growth. |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the National Natural Science Foundation of China (Grant Nos. 50572108;50323007);the “Hundred Talents Program” of the Chinese Academy of Sciences |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 聚合物摩擦学组 ; 纳米润滑研究组 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/4060 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Zhang JY(张俊彦) |
| Recommended Citation GB/T 7714 | Wang CB,Yang SR,Li HX,et al. Elastic properties of a-C:N:H films[J]. Journal of Applied Physics,2007,101:013501(1-6). |
| APA | 王成兵,杨生荣,李红轩,&张俊彦.(2007).Elastic properties of a-C:N:H films.Journal of Applied Physics,101,013501(1-6). |
| MLA | 王成兵,et al."Elastic properties of a-C:N:H films".Journal of Applied Physics 101(2007):013501(1-6). |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 200713501.pdf（155KB） | 开放获取 | CC BY-NC-SA | View Application Full Text | |||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment