Structrure and tribological properties of Ag films deposited at low temperature | |
Department | 固体润滑国家重点实验室 ; 先进润滑与防护材料研究发展中心 |
Weng LJ(翁立军); Sun JY(孙嘉奕); Hu M(胡明); Gao XM(高晓明); Xue QJ(薛群基) | |
2007 | |
Source Publication | Vacuum |
ISSN | 0042-207X |
Volume | 81Pages:997-1002 |
Abstract | The effects of substrate temperature on the structure and tribological properties of Ag films deposited at low temperatures (LT, 130–217 K) by arc ion plating (AIP) have been studied. The structure and morphology of the Ag films were analyzed by X-ray diffraction (XRD), transmission electron microscopy (TEM) and field emission scanning electron microscope (FESEM). The results showed that there exist (1 1 1) and (2 0 0) preferred orientation transitions for decreasing temperature at different bias voltages. The tribological properties were evaluated by a ball-on-disk tribometer and wear tracks were analyzed by means of scanning electron microscopy (SEM). The results show that substrate deposition temperature significantly affected the wear of LT Ag films. For each bias voltage studied, the film showing the highest wear rate was deposited at the lowest temperature and the film with the lowest wear rate, (significantly lower than room temperature (RT) deposited Ag films), was deposited at a temperature between the highest and the lowest temperatures examined. The wear mechanism was discussed in terms of lubrication effect of film material transferred to the counterpart and its dependence on the microstructure of the original deposited film. |
Keyword | Low-temperature Deposition Ag Film Structure Tribological Properties |
Subject Area | 材料科学与物理化学 |
Funding Organization | the National Natural Science Foundation of China (Grant no. 50301015) |
Indexed By | SCI ; EI |
Language | 英语 |
Funding Project | PVD润滑薄膜组 ; 低维材料摩擦学组 |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/3997 |
Collection | 固体润滑国家重点实验室(LSL) 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 |
Corresponding Author | Weng LJ(翁立军) |
Recommended Citation GB/T 7714 | Weng LJ,Sun JY,Hu M,et al. Structrure and tribological properties of Ag films deposited at low temperature[J]. Vacuum,2007,81:997-1002. |
APA | 翁立军,孙嘉奕,胡明,高晓明,&薛群基.(2007).Structrure and tribological properties of Ag films deposited at low temperature.Vacuum,81,997-1002. |
MLA | 翁立军,et al."Structrure and tribological properties of Ag films deposited at low temperature".Vacuum 81(2007):997-1002. |
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