| The effects of nanoscaled amorphous Si and SiNx protective layers on the atomic oxygen resistant and tribological properties of Ag film | |
| Department | 先进润滑与防护材料研究发展中心 |
Hu M(胡明)1,2 ; Gao XM(高晓明)1; Sun JY(孙嘉奕)1; Weng LJ(翁立军)1; Zhou F(周峰)1; Liu WM(刘维民)1; Liu WM(刘维民)
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| The second department | 固体润滑国家重点实验室 |
| 2012 | |
| Source Publication | Applied Surface Science
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| ISSN | 0169-4332 |
| Volume | 258Issue:15Pages:5683-5688 |
| Abstract | The Ag film, and double layer films of Ag/Si and Ag/SiNx were deposited by magnetron sputtering technique. The atomic oxygen (AO) irradiation tests were conducted using a ground AO simulation facility. The microstructure and composition of these films before and after AO irradiation tests were analyzed using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), respectively, atomic force microscope (AFM) and scanning electron microscopy (SEM), respectively. Then the protective effects of nanoscaled amorphous Si and SiNx layers on the atomic oxygen resistant property of Ag film were investigated. The results show that nanoscaled Si or SiNx protective layer can provide better protection to Ag film against oxidation caused by AO irradiation. The silica layer formed on the surface of amorphous protective layers during AO exposure process plays the key role in protecting Ag film from oxidation. On the other hand, the tribological performance of Ag film and the multilayer films was comparatively studied using a ball-on-disc tribometer in vacuum condition. The tribotest results indicate that Ag/Si and Ag/SiNx films show the better lubricating performance before and after AO irradiation than pure Ag film. |
| Keyword | Atomic Oxygen Resistance Tribological Properties Ag Film Amorphous Si And Sinx Protective Film |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1016/j.apsusc.2012.02.062 |
| Indexed By | SCI |
| If | 2.112 |
| Language | 英语 |
| Funding Project | PVD润滑薄膜材料组;空间润滑材料组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/3295 |
| Collection | 固体润滑国家重点实验室（LSL） 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 |
| Corresponding Author | Liu WM(刘维民) |
| Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| Recommended Citation GB/T 7714 | Hu M,Gao XM,Sun JY,et al. The effects of nanoscaled amorphous Si and SiNx protective layers on the atomic oxygen resistant and tribological properties of Ag film[J]. Applied Surface Science,2012,258(15):5683-5688. |
| APA | Hu M.,Gao XM.,Sun JY.,Weng LJ.,Zhou F.,...&刘维民.(2012).The effects of nanoscaled amorphous Si and SiNx protective layers on the atomic oxygen resistant and tribological properties of Ag film.Applied Surface Science,258(15),5683-5688. |
| MLA | Hu M,et al."The effects of nanoscaled amorphous Si and SiNx protective layers on the atomic oxygen resistant and tribological properties of Ag film".Applied Surface Science 258.15(2012):5683-5688. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 5683-5688.PDF（1208KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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