| Fabrication of nanopatterns on H-passivated Si surface by AFM local anodic oxidation | |
| Department | 固体润滑国家重点实验室 |
| Mo YF(莫宇飞); Wang Y(王莹); Bai MW(白明武) | |
| 2008 | |
| Source Publication | Physica E
 |
| ISSN | 1386-9477 |
| Volume | 41Pages:146-149 |
| Abstract | Nano-sized patterns resulted from localized electrochemical oxidation by using atomic force microscopy (AFM) were fabricated on H-passivated Si surface. In this paper, the fabrication of nanopattern by local anodic oxidation (LAO) on H-passivated Si surface is presented. A special attention is paid to finding relations between the size of oxide nanopatterns and operational parameters such as tip-sample pulsed bias voltage, pulsewidth and relative humidity to fabricate oxide nanopattern. The LAO process shows the highly potential of solution processes for fabricating nano/micro-devices constructed from semiconductor materials for visible-light-emitting devices. |
| Keyword | Nanopattern Local Anodic Oxidation Atomic Force Microscopy Pulse Bias Voltage |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the Innovative Group Foundation from National Natural Science Foundation of China (NSFC) under Grant number 20773148;NSFC 50675217;National 973 Program 2007CB607601 |
| Indexed By | SCI |
| Language | 英语 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/2686 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Bai MW(白明武) |
| Recommended Citation GB/T 7714 | Mo YF,Wang Y,Bai MW. Fabrication of nanopatterns on H-passivated Si surface by AFM local anodic oxidation[J]. Physica E,2008,41:146-149. |
| APA | 莫宇飞,王莹,&白明武.(2008).Fabrication of nanopatterns on H-passivated Si surface by AFM local anodic oxidation.Physica E,41,146-149. |
| MLA | 莫宇飞,et al."Fabrication of nanopatterns on H-passivated Si surface by AFM local anodic oxidation".Physica E 41(2008):146-149. |
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| 2008146-149.PDF（583KB） | 开放获取 | License | View Application Full Text | |||
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