| Growth and structure of hydrogenated carbon films containing fullerene-like structure | |
| Department | 固体润滑国家重点实验室 |
Wang P(王鹏) ; Wang X(王霞); Liu WM(刘维民); Zhang JY(张俊彦)
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| 2008 | |
| Source Publication | Journal of Physics D:Applied Physics
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| ISSN | 0022-3727 |
| Volume | 41Pages:85401(1-7) |
| Abstract | Hydrogenated carbon films were prepared by magnetron sputtering of a titanium target in methane and argon atmosphere. The film grown at −800V bias exhibits excellent mechanical properties with a hardness of 20.9 GPa and an elastic recovery as high as 85%. Its structure, characterized by high-resolution transmission electron microscopy, Raman spectrum, and x-ray photoelectron spectroscopy, can be described as fullerene-like structures uniformly dispersed in an amorphous carbon matrix. In order to reveal the evolution of fullerene-like structures in our films, different bias voltages were introduced. The results show that high bias voltage leads to the accumulation of high compressive internal stress in the film and promotes the evolution of fullerene-like structures. Although the film grown at −800V bias presents high sp2 bonding content, it exhibits good mechanical properties with high hardness and high elasticity at the same time; we attribute it to the unique structure of the film, in which a fullerene-like structure, just like a molecule spring dispersed in the film, reserves the elastic energy during distortion through reversible bond rotation and bond angle deflection, while the amorphous carbon matrix restrains the relaxation of the rigid C–C network and compressive stress and restricts the slip of graphene sheets. |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | 863 Projects (Grant No 2007AA03Z388);973 Projects (Grant No. 2007CB607601) of the Ministry of Science and Technology of China;the ‘Hundred Talents Program’ of the Chinese Academy of Sciences |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 空间润滑材料组 ; 纳米润滑材料组 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/2650 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Liu WM(刘维民); Zhang JY(张俊彦) |
| Recommended Citation GB/T 7714 | Wang P,Wang X,Liu WM,et al. Growth and structure of hydrogenated carbon films containing fullerene-like structure[J]. Journal of Physics D:Applied Physics,2008,41:85401(1-7). |
| APA | 王鹏,王霞,刘维民,&张俊彦.(2008).Growth and structure of hydrogenated carbon films containing fullerene-like structure.Journal of Physics D:Applied Physics,41,85401(1-7). |
| MLA | 王鹏,et al."Growth and structure of hydrogenated carbon films containing fullerene-like structure".Journal of Physics D:Applied Physics 41(2008):85401(1-7). |
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| 200885401-85407.pdf（1659KB） | 开放获取 | License | View Application Full Text | |||
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