| The evolution of the structure and mechanical properties of fullerenelike hydrogenated amorphous carbon films upon annealing | |
| Department | 固体润滑国家重点实验室 |
Wang Q(王琦); He DY(贺德衍); Wang CB(王成兵); Wang Z(王舟); Zhang JY(张俊彦)
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| 2008 | |
| Source Publication | Journal of Applied Physics
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| ISSN | 0021-8979 |
| Volume | 104Pages:43511(1-5) |
| Abstract | Hydrogenated amorphous carbon films were deposited on Si 100 substrates using dc-pulse plasma chemical vapor deposition. Structurally, the as-deposited carbon films could be considered as nanocomposite thin films with fullerenelike microstructure in diamondlike carbon matrix based on our previous result Q.Wang et al., Appl. Phys. Lett. 91, 141902 2007 . In this paper, the evolution of the structure and the mechanical properties of hydrogenated carbon films with fullerenelike microstructure on the annealing in vacuum was investigated. The fullerenelike hydrogenated carbon films annealed at 500 °C showed higher hardness 16.9% harder and higher elastic recovery 11.2% higher than the as-deposited films. The friction coefficient of fullerenelike hydrogenated carbon films in air with 40% relative humidity remained constant at about 0.037 when annealed at 600 °C. The wear rate of the films decreased sharply when annealed at 200 or 300 °C. Structural analysis shows that annealing at 300 °C improved tribological properties originated from the volume increase in the fullerenelike microstructure, and further annealing at 600 °C improved mechanical properties originated from the transformation of nanosized curved sp2 to sp3 clusters. |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | “863” Program of Chinese Ministry of Science and Technology with Grant No. 2007AA03Z338;“Hundreds Talent Program” of Chinese Academy of Sciences |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 纳米润滑研究 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/2617 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | He DY(贺德衍) |
| Recommended Citation GB/T 7714 | Wang Q,He DY,Wang CB,et al. The evolution of the structure and mechanical properties of fullerenelike hydrogenated amorphous carbon films upon annealing[J]. Journal of Applied Physics,2008,104:43511(1-5). |
| APA | 王琦,贺德衍,王成兵,王舟,&张俊彦.(2008).The evolution of the structure and mechanical properties of fullerenelike hydrogenated amorphous carbon films upon annealing.Journal of Applied Physics,104,43511(1-5). |
| MLA | 王琦,et al."The evolution of the structure and mechanical properties of fullerenelike hydrogenated amorphous carbon films upon annealing".Journal of Applied Physics 104(2008):43511(1-5). |
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