| Microstructure and mechanical properties of Mo/DLC nanocomposite films | |
| Department | 固体润滑国家重点实验室 ; 先进润滑与防护材料研究发展中心 |
Ji L(吉利) ; Li HX(李红轩); Zhao F(赵飞); Chen JM(陈建敏); Zhou HD(周惠娣)
| |
| 2008 | |
| Source Publication | Diamond and Related Materials
 |
| ISSN | 0925-9635 |
| Volume | 17Pages:1949-1954 |
| Abstract | Mo-doped diamond-like carbon (Mo/DLC) films were deposited on stainless steel and Si wafer substrates via unbalanced magnetron sputtering of molybdenum combined with inductively coupled radio frequency (RF) plasma chemical vapor deposition of CH4/Ar. The effects of Mo doping and sputtering current on the microstructure and mechanical properties of the as-deposited filmswere investigated bymeans of X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), transmission electron microscopy (TEM), Raman spectroscopy, atomic forcemicroscopy (AFM), and nano-indentation. It was found that Mo doping led to increase in the content of sp2 carbon, and hence decreased the hardness and elastic modulus of Mo/DLC films as compared with that of DLC films. The content ofMoin the films increased with the increasing sputtering current, and most of Moreacted with C atoms to formMoC nanocrystallites at a higher sputtering current. Moreover, theMo-doped DLC films had greatlydecreased internal stress and increased adhesion to the substrate than the DLC film,which could be closely related to the unique nanocomposite structure of theMo-doped films. Namely, the Mo/DLC filmwas composed of MoC nanoparticles embedded in the cross-linked amorphous carbon matrix, and such a kind of nanostructure was beneficial to retaining the loss of hardness and elastic modulus. |
| Keyword | Diamond-like Carbon Composites Nanostructures Mechanical Properties |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the National Natural Science Foundation of China (Nos. 50705093;50575217);Innovative Group Foundation from NSFC (No. 50421502);“973” Project (No. 2007CB607601);the foundational scientific research of China (No.A1320060604) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 磨损和表面工程组 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/2599 |
| Collection | 固体润滑国家重点实验室（LSL） 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 |
| Corresponding Author | Chen JM(陈建敏) |
| Recommended Citation GB/T 7714 | Ji L,Li HX,Zhao F,et al. Microstructure and mechanical properties of Mo/DLC nanocomposite films[J]. Diamond and Related Materials,2008,17:1949-1954. |
| APA | 吉利,李红轩,赵飞,陈建敏,&周惠娣.(2008).Microstructure and mechanical properties of Mo/DLC nanocomposite films.Diamond and Related Materials,17,1949-1954. |
| MLA | 吉利,et al."Microstructure and mechanical properties of Mo/DLC nanocomposite films".Diamond and Related Materials 17(2008):1949-1954. |
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| 20081949-1954.PDF（1169KB） | 开放获取 | License | View Application Full Text | |||
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