| Stress relief patterns of hydrogenated amorphous carbon films grown by dc-pulse plasma chemical vapor deposition | |
| Department | 固体润滑国家重点实验室 |
Wang Q(王琦); Wang CB(王成兵); Wang Z(王舟); Zhang JY(张俊彦) ; He DY(贺德衍)
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| 2008 | |
| Source Publication | Applied Surface Science
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| ISSN | 0169-4332 |
| Volume | 255Pages:1836-1840 |
| Abstract | Hydrogenated amorphous carbon films were prepared on Si (1 0 0) substrates by dc-pulse plasma chemical vapor deposition. The nature of the deposited films was characterized by Raman spectra and the stress relief patterns were observed by scanning electron microscope. Besides the well-known sinusoidal type and flower type patterns, etc., two different stress relief patterns, ring type and peg-top shape with exiguous tine on the top, were observed. The ring type in this paper was a clear ridge-cracked buckle and unusual. Two competing buckle delamination morphologies ring and sinusoidal buckling coexist. The ridge-cracked buckle in ring type was narrower than the sinusoidal buckling. Meanwhile peg-top shape with exiguous tine on the top in this paper was unusual. These different patterns supported the approach in which the stress relief forms have been analyzed using the theory of plate buckling. |
| Keyword | Amorphous Carbon Stress Buckling Dc-pulse Plasma Chemical Vapor Deposition |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | ‘‘863’’ program (No. 2007AA03Z338) of Chinese Ministry of Science and Technology;‘‘Hundreds Talent Program’’ of Chinese Academy of Sciences |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 纳米润滑研究组 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/2584 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | He DY(贺德衍) |
| Recommended Citation GB/T 7714 | Wang Q,Wang CB,Wang Z,et al. Stress relief patterns of hydrogenated amorphous carbon films grown by dc-pulse plasma chemical vapor deposition[J]. Applied Surface Science,2008,255:1836-1840. |
| APA | 王琦,王成兵,王舟,张俊彦,&贺德衍.(2008).Stress relief patterns of hydrogenated amorphous carbon films grown by dc-pulse plasma chemical vapor deposition.Applied Surface Science,255,1836-1840. |
| MLA | 王琦,et al."Stress relief patterns of hydrogenated amorphous carbon films grown by dc-pulse plasma chemical vapor deposition".Applied Surface Science 255(2008):1836-1840. |
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