Superlow friction behavior of Si-doped hydrogenated amorphous carbon film in water environment | |
Department | 固体润滑国家重点实验室 ; 先进润滑与防护材料研究发展中心 |
Zhao F(赵飞); Li HX(李红轩); Ji L(吉利); Mo YF(莫宇飞); Quan WL(权伟龙); Du W(杜雯); Zhou HD(周惠娣); Chen JM(陈建敏) | |
2009 | |
Source Publication | Surface & Coatings Technology |
ISSN | 0257-8972 |
Volume | 203Pages:981-985 |
Abstract | Si-doped hydrogenated amorphous carbon (a-C:H:Si) film was prepared using hybrid radio frequency plasmaenhanced chemical vapor deposition (R.F. PECVD) and non-balancedmagnetron sputtering deposition technique. The microstructure of the film was characterized by means of Raman spectrometry, X-ray photoelectron spectroscopy (XPS), and X-ray diffraction (XRD),while its friction behavior inwater environmentwas investigated using a ball-on-disc tribometer. Results show that the a-C:H:Si filmhas typical diamond-like characteristics, and Si dopedwith a relative atomic concentration of about 3.9% in the filmmainly exists in the formof Si, SiC, and SiO2, while it shows a superlowfriction coefficient of about 0.005 inwater environmentwhen sliding against Si3N4 ball. The superlowfriction behavior of the hybrid diamond-like-carbon (DLC) filmcould be attributed to the formation of a tribochemical reaction filmand boundary lubrication layermainly consisting of colloidal silica generated from tribochemical reactions between silicides and water molecules. |
Keyword | A-c:h:Si FIlm Superlow Friction Coefficien Water Environment Tribochemical Reaction |
Subject Area | 材料科学与物理化学 |
Funding Organization | the National Natural Science Foundation of China (NSFC, Grant No.50705093;No.50575217);the Innovative Group Fund from NSFC (Grant No.50421502);the National 973 Project (No.2007-CB607601) |
Indexed By | SCI |
Language | 英语 |
Funding Project | 磨损与表面工程 |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/2120 |
Collection | 固体润滑国家重点实验室(LSL) 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 |
Corresponding Author | Chen JM(陈建敏) |
Recommended Citation GB/T 7714 | Zhao F,Li HX,Ji L,et al. Superlow friction behavior of Si-doped hydrogenated amorphous carbon film in water environment[J]. Surface & Coatings Technology,2009,203:981-985. |
APA | 赵飞.,李红轩.,吉利.,莫宇飞.,权伟龙.,...&陈建敏.(2009).Superlow friction behavior of Si-doped hydrogenated amorphous carbon film in water environment.Surface & Coatings Technology,203,981-985. |
MLA | 赵飞,et al."Superlow friction behavior of Si-doped hydrogenated amorphous carbon film in water environment".Surface & Coatings Technology 203(2009):981-985. |
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