| Microstructure Changes of Ti-Al-C Films Deposited by Filtered Cathodic Vacuum Arc | |
| Department | 固体润滑国家重点实验室 |
Pang XJ(逄显娟)1,2,3; Liu XQ(刘小强)2 ; Jin, Bo2
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| 2014 | |
| Source Publication | Journal of Nanomaterials
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| ISSN | 1687-4110 |
| Pages | 286484(1-7) |
| Abstract | Nanocomposite Ti-Al-C films were deposited by filtered cathodic vacuum arc (FCVA) at different CH4 flows. The deposited films were characterized in terms of elemental and phase compositions, chemical bonds, and texture as a function of CH4 flow rate by XRD, XPS, HRTEM, Raman spectroscopy, and IR spectroscopy. The results show that the TiC grain size decreases from 4.2 to 2.9 nm as the CH4 flow rate increases from 30 to 80 sccm. The analysis of XPS, HRTEM, and Raman spectroscopy shows that the microstructure of deposited films turns from a TiC dominant TiC-C film to a carbon network dominant TiAl-doped a-C film structure as the CH4 flow increases from 30 sccm to 80 sccm. IR spectroscopy shows that most of the hydrogen atoms in the deposited films are bonded to the sp3-hybridized C atoms. All the composition and microstructure change can be explained by considering the plasma conditions and the effect of CH4 flow. |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1155/2014/286484 |
| Funding Organization | the Natural Science Foundation of China (Grant no. 50902133);the Project of the Education Department of Henan Province (14A430009);the Open Fund of State Key Laboratory of Solid Lubrication (1201);the Fund of Henan University of Science and Technology (2013QN001) |
| Indexed By | SCI |
| If | 1.644 |
| Language | 英语 |
| compositor | 第二作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/20334 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Affiliation | 1.Henan Univ Sci & Technol, Sch Chem Engn & Pharmaceut, Luoyang 471023, Peoples R China 2.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 3.Henan Key Lab Mat Tribol, Luoyang 471003, Peoples R China |
| Recommended Citation GB/T 7714 | Pang XJ,Liu XQ,Jin, Bo. Microstructure Changes of Ti-Al-C Films Deposited by Filtered Cathodic Vacuum Arc[J]. Journal of Nanomaterials,2014:286484(1-7). |
| APA | Pang XJ,Liu XQ,&Jin, Bo.(2014).Microstructure Changes of Ti-Al-C Films Deposited by Filtered Cathodic Vacuum Arc.Journal of Nanomaterials,286484(1-7). |
| MLA | Pang XJ,et al."Microstructure Changes of Ti-Al-C Films Deposited by Filtered Cathodic Vacuum Arc".Journal of Nanomaterials (2014):286484(1-7). |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 286484.pdf（2639KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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