Relationship between bias voltage and microstructure as well as properties of CrAlYN films | |
Department | 先进润滑与防护材料研究发展中心 |
Fu YY(付英英)1,2; Li HX(李红轩)1; Ji L(吉利)1; Liu XH(刘晓红)1; Liu L(刘流)3; Zhou HD(周惠娣)1; Chen JM(陈建敏)1; Ji L(吉利); Chen JM(陈建敏) | |
2015 | |
Source Publication | Chinese Physics B |
ISSN | 1674-1056 |
Volume | 24Issue:11Pages:11620(1-10) |
Abstract | In this work, a series of CrAlYN films doped with 1 at.% yttrium were deposited by unbalanced reactive magnetron sputtering under different bias voltages. The effects of bias voltage on microstructure and properties of the CrAlYN films were subsequently investigated. It is found that all the as-deposited films have similar chemical composition and crystalline structure. However, the bias voltage has significant impact on the mechanical properties and oxidation resistance of the resulting films. Namely, the film deposited at 100 V has the highest hardness and best oxidation resistance, which are mainly attributed to its denser structure and higher Al content than others. In addition, the film obtained at 100 V exhibits superior oxidation resistance even at 1000 °C, and good friction and wear properties at 600 and 800 °C, and the latter two are mainly ascribed to the formation of compact transfer layer on the worn surfaces. However, this film experienced obvious wear loss at low testing temperatures (i.e., 200 and 400 °C) due to the serious abrasive wear. |
Keyword | Cralyn Film Bias Voltage Microstructure Properties |
Subject Area | 材料科学与物理化学 |
DOI | 10.1088/1674-1056/24/11/116201 |
Funding Organization | the National Basic Research Program of China (Grant No. 2013CB632302);the National Natural Science Foundation of China (Grant No. 51175491) |
Indexed By | SCI |
If | 1.436 |
Language | 英语 |
Funding Project | 磨损与表面工程课题组 |
compositor | 第一作者单位 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/19206 |
Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室(LSL) |
Corresponding Author | Ji L(吉利); Chen JM(陈建敏) |
Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.Tianshui Normal Univ, Sch Life Sci Chem, Tianshui 741000, Peoples R China |
Recommended Citation GB/T 7714 | Fu YY,Li HX,Ji L,et al. Relationship between bias voltage and microstructure as well as properties of CrAlYN films[J]. Chinese Physics B,2015,24(11):11620(1-10). |
APA | Fu YY.,Li HX.,Ji L.,Liu XH.,Liu L.,...&陈建敏.(2015).Relationship between bias voltage and microstructure as well as properties of CrAlYN films.Chinese Physics B,24(11),11620(1-10). |
MLA | Fu YY,et al."Relationship between bias voltage and microstructure as well as properties of CrAlYN films".Chinese Physics B 24.11(2015):11620(1-10). |
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201511620.pdf(5524KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text |
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