| 直流法制备类富勒烯碳氢薄膜的摩擦学性能研究 | |
| Department | 先进润滑与防护材料研究发展中心 |
欧玉静1; 郭俊猛1,2; 王永富2; 高凯雄2 ; 梁爱民2; 张斌2; 张俊彦2
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| The second department | 固体润滑国家重点实验室 |
| 2015 | |
| Source Publication | 摩擦学学报
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| ISSN | 1004-0595 |
| Volume | 35Issue:1Pages:82-89 |
| Abstract | Hydrogenated fullerene－like carbon (FL－C∶H) films were deposited on Si (100) substrates by a direct current plasma enhanced chemical vapor deposition(dc－PECVD) technique using pure CH4 as feedstock. Simplify the hydrogen fullerene (FL－C: H) films prepared by pulsed bias － assisted plasma chemical vapor process (mc－PECVD). The microstructures and the FL content of the FL－C∶ H films were characterized by high transmission electron microscopy and Raman spectrum. The mechanical properties and friction behaviors of the films were investigated by using a Nano－indenter and a ball－ on－disk tester． Results show that compared with the hydrogen－containing fullerene －like filmsprepared by pulse bias－assisted method, FL－C∶ H films prepared by dc method that exhibited a similar icrostructure, superior excellent mechanical properties and tribological performance, and these films showed low sensitivity to load , frequency and relative humidity. ;采用直流等离子体化学气相沉积(dc－PECVD) 技术，以甲烷为前驱体，在单晶硅表面制备了含氢类富勒烯(FL－C∶H) 薄膜． 简化了含氢类富勒烯(FL－C∶ H) 薄膜的脉冲偏压协助等离子体化学气相制备过程(mc－PECVD)，通过高分辨率透射电镜和拉曼光谱确定了FL－C∶H 薄膜的微观结构和薄膜内的富勒烯含量; 通过纳米压痕和往复摩擦试验对比了两种方法制备的FL－C∶H 与传统的DLC 薄膜的硬度及摩擦性能．结果表明: 与用脉冲偏压协助方案制备的含氢类富勒烯薄膜相比，直流方案制备的FL－C∶H薄膜具有相似的微观结构，更优异的机械特性及摩擦学性能，同时该薄膜表现出对载荷、频率和相对湿度的低敏感性． |
| Keyword | 直流 类富勒烯 脉冲偏压协助 低敏感性 Direct Current Fullerene-like Pulse Bias-assisted Low Sensitivity |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.16078 /j.tribology.2015.01.012 |
| Funding Organization | 国家973 项目(2013CB632304);国家自然科学基金(51275508;51205383) |
| Indexed By | EI&CSCD |
| If | 0.6263(CSCD-JCR) |
| Language | 中文 |
| Funding Project | 纳米润滑研究组 |
| compositor | 第二作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/19137 |
| Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室（LSL） |
| Corresponding Author | 张俊彦 |
| Affiliation | 1.兰州理工大学 2.中国科学院兰州化学物理研究所 |
| Corresponding Author Affilication | Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences |
| Recommended Citation GB/T 7714 | 欧玉静,郭俊猛,王永富,等. 直流法制备类富勒烯碳氢薄膜的摩擦学性能研究[J]. 摩擦学学报,2015,35(1):82-89. |
| APA | 欧玉静.,郭俊猛.,王永富.,高凯雄.,梁爱民.,...&张俊彦.(2015).直流法制备类富勒烯碳氢薄膜的摩擦学性能研究.摩擦学学报,35(1),82-89. |
| MLA | 欧玉静,et al."直流法制备类富勒烯碳氢薄膜的摩擦学性能研究".摩擦学学报 35.1(2015):82-89. |
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| 论文-4.pdf（1359KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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