Synthesis and characterization of low-friction Al-DLC films with high hardness and low stress | |
Department | 固体润滑国家重点实验室 |
Pu JB(蒲吉斌); Zhang GA(张广安); Wan SH(万善宏); Zhang RH(张仁辉); Zhang GA(张广安) | |
2015 | |
Source Publication | Journal of Composite Materials |
ISSN | 0021-9983 |
Volume | 49Issue:2Pages:199-207 |
Abstract | Al-diamond-like carbon films were successfully deposited by the reactive magnetron sputtering of Al target (>99.9%) in the argon and methane gas mixture atmosphere under selected substrate negative bias with high pulse cycle duty (50%). The microstructure, mechanical and tribological properties of the as-prepared Al-diamond-like carbon films were investigated. Results showed that these films were dominated by the typical amorphous structure, and the internal stress of films dramatically decreased while the hardness remained a high level (∼20 GPa) with increasing substrate pulse negative bias. Especially, the Al-diamond-like carbon film fabricated at substrate bias of −500 V displayed a longer wear life and lower friction coefficient due to both itself superior mechanical properties and the formation of continuous and compact graphitized transfer layer, making it a good candidate for solid lubricating film in engineering applications. |
Keyword | Metal Doped Diamond-like Carbon Films Magnetron Sputtering Internal Stress Hardness Friction And Wear |
Subject Area | 材料科学与物理化学 |
DOI | 10.1177/0021998313515291 |
Funding Organization | Natural Science Foundation of China (Grant No. 51105352;51305433) |
Indexed By | SCI |
If | 1.242 |
Language | 英语 |
Funding Project | 低维材料摩擦学组 |
compositor | 第一作者单位 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/18802 |
Collection | 固体润滑国家重点实验室(LSL) |
Corresponding Author | Zhang GA(张广安) |
Affiliation | State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou |
Recommended Citation GB/T 7714 | Pu JB,Zhang GA,Wan SH,et al. Synthesis and characterization of low-friction Al-DLC films with high hardness and low stress[J]. Journal of Composite Materials,2015,49(2):199-207. |
APA | Pu JB,Zhang GA,Wan SH,Zhang RH,&张广安.(2015).Synthesis and characterization of low-friction Al-DLC films with high hardness and low stress.Journal of Composite Materials,49(2),199-207. |
MLA | Pu JB,et al."Synthesis and characterization of low-friction Al-DLC films with high hardness and low stress".Journal of Composite Materials 49.2(2015):199-207. |
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