| Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass | |
| Department | 先进润滑与防护材料研究发展中心 |
Wang, Linqing1,4; Wang, Weiyan2; Huang, Jinhua2; Zeng, Yuheng2; Tan, Ruiqin3; Song, Weijie2; Chen JM(陈建敏)1 ; Chen JM(陈建敏)
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| The second department | 固体润滑国家重点实验室 |
| 2014 | |
| Source Publication | Journal of Non-Crystalline Solids
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| ISSN | 0022-3093 |
| Volume | 388Pages:86-90 |
| Abstract | Hydrogenated microcrystalline silicon (mu c-Si:H) thin films were deposited on glass by magnetron sputtering at the substrate temperature of 100 degrees C and the hydrogen dilution ratio of 65%. The crystallinity and microstructure of thin films were systematically studied using Raman spectroscopy, X-ray diffraction (XRD), transmission electron microscopy (TEM), and Fourier transform infrared spectroscopy (FT-IR). The results showed that the mu c-Si:H thin film was amorphous and hydrogen-rich at the initial stage of the growth. This amorphous layer was crystallized during further growth. The crystallinity of thin films is not almost changed with the increase of thickness when the thickness of thin film exceeds 70 nm. Finally, the mu c-Si:H thin film without amorphous incubation layer was obtained. The possible growth mechanism of fabricating mu c-Si:H thin films without amorphous incubation layers was also discussed. |
| Keyword | Mu C-si:h Thin Films Magnetron Sputtering Amorphous Incubation Layers Low Temperature |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1016/j.jnoncrysol.2014.01.038 |
| Funding Organization | the National Natural Science Foundation of China (Grant No. 61106096);the ZHejiang Provincial Natural Science Foundation of China (Grant No. LY12E02009);the Ningbo Natural Science Foundation (Grant No. 2012A610120) |
| Indexed By | SCI |
| If | 1.766 |
| Language | 英语 |
| Funding Project | 磨损与表面工程课题组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/18298 |
| Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Chen JM(陈建敏) |
| Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China 3.Ningbo Univ, Fac Informat Sci & Engn, Ningbo 315211, Zhejiang, Peoples R China 4.Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
| Recommended Citation GB/T 7714 | Wang, Linqing,Wang, Weiyan,Huang, Jinhua,et al. Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass[J]. Journal of Non-Crystalline Solids,2014,388:86-90. |
| APA | Wang, Linqing.,Wang, Weiyan.,Huang, Jinhua.,Zeng, Yuheng.,Tan, Ruiqin.,...&陈建敏.(2014).Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass.Journal of Non-Crystalline Solids,388,86-90. |
| MLA | Wang, Linqing,et al."Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass".Journal of Non-Crystalline Solids 388(2014):86-90. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| LZ01027803.pdf（800KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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