Fabrication of Thin Graphene Layers on a Stacked 6H-SiC Surface in a Graphite Enclosure
Department先进润滑与防护材料研究发展中心
Deng PF(邓鹏飞)1; Lei TM(雷天民)1; Lv JJ(吕晋军)3; Liu FY(刘福燕)2; Zhang YM(张玉明)2; Guo H(郭辉)2; Zhang YM(张义门)2; Wang YH(王悦湖)2; Tang XY(汤晓燕)2; Lei TM(雷天民)
The second department固体润滑国家重点实验室
2013
Source PublicationChinese Physics Letters
ISSN0256-307X
Volume30Issue:1
AbstractThin and homogeneous epitaxial graphene (EG) layers on a 6H-SiC (000 (1) over bar) substrate are fabricated and they cover the whole substrate (10 x 10 mm2). The sample surface is capped by another 6H-SiC (000ȋ) wafer in a graphite enclosure to form a relatively high Si partial pressure between them, which significantly reduces the extremely high growth rate of EG. The structure and morphology of the EG layers are investigated by Raman spectroscopy, atomic force microscopy and field-emission scanning electronic microscopy. The results are compared with an uncapped sample surface, and reveal the obvious existence of ridges on the surface of the EG, and show that capping is indeed beneficial to obtain homogeneous graphene.
Subject Area材料科学与物理化学
DOI10.1088/0256-307X/30/1/018101
Funding Organizationthe National Science and Technology Major Project of Science and Technology of China under Grant No. 2011ZX02707
Indexed BySCI
If0.924
Language英语
compositor第三作者单位
Citation statistics
Cited Times:5[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.licp.cn/handle/362003/18238
Collection中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心
固体润滑国家重点实验室(LSL)
Corresponding AuthorLei TM(雷天民)
Affiliation1.Xidian Univ, Sch Tech Phys, Xian 710071, Peoples R China
2.Xidian Univ, Sch Microelect, Xian 710071, Peoples R China
3.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
Recommended Citation
GB/T 7714
Deng PF,Lei TM,Lv JJ,et al. Fabrication of Thin Graphene Layers on a Stacked 6H-SiC Surface in a Graphite Enclosure[J]. Chinese Physics Letters,2013,30(1).
APA Deng PF.,Lei TM.,Lv JJ.,Liu FY.,Zhang YM.,...&雷天民.(2013).Fabrication of Thin Graphene Layers on a Stacked 6H-SiC Surface in a Graphite Enclosure.Chinese Physics Letters,30(1).
MLA Deng PF,et al."Fabrication of Thin Graphene Layers on a Stacked 6H-SiC Surface in a Graphite Enclosure".Chinese Physics Letters 30.1(2013).
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