Fabrication of Thin Graphene Layers on a Stacked 6H-SiC Surface in a Graphite Enclosure | |
Department | 先进润滑与防护材料研究发展中心 |
Deng PF(邓鹏飞)1; Lei TM(雷天民)1; Lv JJ(吕晋军)3; Liu FY(刘福燕)2; Zhang YM(张玉明)2; Guo H(郭辉)2; Zhang YM(张义门)2; Wang YH(王悦湖)2; Tang XY(汤晓燕)2; Lei TM(雷天民) | |
The second department | 固体润滑国家重点实验室 |
2013 | |
Source Publication | Chinese Physics Letters |
ISSN | 0256-307X |
Volume | 30Issue:1 |
Abstract | Thin and homogeneous epitaxial graphene (EG) layers on a 6H-SiC (000 (1) over bar) substrate are fabricated and they cover the whole substrate (10 x 10 mm2). The sample surface is capped by another 6H-SiC (000ȋ) wafer in a graphite enclosure to form a relatively high Si partial pressure between them, which significantly reduces the extremely high growth rate of EG. The structure and morphology of the EG layers are investigated by Raman spectroscopy, atomic force microscopy and field-emission scanning electronic microscopy. The results are compared with an uncapped sample surface, and reveal the obvious existence of ridges on the surface of the EG, and show that capping is indeed beneficial to obtain homogeneous graphene. |
Subject Area | 材料科学与物理化学 |
DOI | 10.1088/0256-307X/30/1/018101 |
Funding Organization | the National Science and Technology Major Project of Science and Technology of China under Grant No. 2011ZX02707 |
Indexed By | SCI |
If | 0.924 |
Language | 英语 |
compositor | 第三作者单位 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/18238 |
Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室(LSL) |
Corresponding Author | Lei TM(雷天民) |
Affiliation | 1.Xidian Univ, Sch Tech Phys, Xian 710071, Peoples R China 2.Xidian Univ, Sch Microelect, Xian 710071, Peoples R China 3.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
Recommended Citation GB/T 7714 | Deng PF,Lei TM,Lv JJ,et al. Fabrication of Thin Graphene Layers on a Stacked 6H-SiC Surface in a Graphite Enclosure[J]. Chinese Physics Letters,2013,30(1). |
APA | Deng PF.,Lei TM.,Lv JJ.,Liu FY.,Zhang YM.,...&雷天民.(2013).Fabrication of Thin Graphene Layers on a Stacked 6H-SiC Surface in a Graphite Enclosure.Chinese Physics Letters,30(1). |
MLA | Deng PF,et al."Fabrication of Thin Graphene Layers on a Stacked 6H-SiC Surface in a Graphite Enclosure".Chinese Physics Letters 30.1(2013). |
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LZ01027716.pdf(1109KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text |
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