| The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering | |
| Department | 固体润滑国家重点实验室 ; 先进润滑与防护材料研究发展中心 |
Wang YJ(王永军); Li HX(李红轩) ; Ji L(吉利); Zhao F(赵飞); Liu XH(刘晓红); Kong QH(孔庆花); Wang YX(王永霞); Quan WL(权伟龙); Zhou HD(周惠娣); Chen JM(陈建敏)
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| 2010 | |
| Source Publication | Journal of Physics D: Applied Physics
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| ISSN | 0022-3727 |
| Volume | 43Pages:505401(1-8) |
| Abstract | The effect of duty cycle on the microstructure and properties of graphite-like amorphouscarbon films prepared by unbalanced magnetron sputtering was investigated. The structure ofthe resultant carbon film is amorphous, as shown by high-resolution transmission electronmicroscopy. Raman analysis shows that the studied films are dominated by sp2sites, and theintensity ratio of the D and G peaks ranges from 4.0 at a duty cycle of 20% to 6.0 at 50%,which is one order of magnitude larger than that of diamond-like carbon films, indicating anobvious increase in sp2sites with duty cycle. The surface morphology was investigated byatomic force microscopy. The images show that the as-deposited carbon films have a veryrough surface, and the maximum granular structure size is up to 180 nm in diameter and 50 nmin height. The hardness and internal stress of the resultant carbon films increase withincreasing duty cycle, accompanied by an increase in sp2fraction in the films, which isdifferent from the diamond-like carbon films. In addition, the resultant carbon films showsuperior tribological properties with high load-bearing capacity and excellent wear resistance.The influence of duty cycle on the microstructure and properties is discussed in detail. |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the National Natural Science Foundation of China (Grant No 50705093);the Innovative Group Foundation from NSFC (GrantNo 50421502);the National 973 Project (No 2007 CB607601) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 磨损和表面工程组 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/1025 |
| Collection | 固体润滑国家重点实验室（LSL） 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 |
| Corresponding Author | Chen JM(陈建敏) |
| Recommended Citation GB/T 7714 | Wang YJ,Li HX,Ji L,et al. The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering[J]. Journal of Physics D: Applied Physics,2010,43:505401(1-8). |
| APA | 王永军.,李红轩.,吉利.,赵飞.,刘晓红.,...&陈建敏.(2010).The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering.Journal of Physics D: Applied Physics,43,505401(1-8). |
| MLA | 王永军,et al."The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering".Journal of Physics D: Applied Physics 43(2010):505401(1-8). |
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| 2010505401.pdf（1301KB） | 开放获取 | License | View Application Full Text | |||
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